Substrate Transport Controller Jig-Free Teaching Accuracy
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Solution Overview
Problem
Existing substrate processing apparatuses require dedicated jigs for teaching operations, increasing operator burden, maintenance costs, and equipment expenses.
Innovation Solution
A substrate processing apparatus with a controller that uses a position detector to correct the target position of a transport device to match a preset reference position, eliminating the need for dedicated jigs by integrating a guide mechanism and position detection during teaching and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a dedicated jig with optical sensor is used for teaching operations, then teaching accuracy is improved, but device complexity and cost increase
Solution Approach 1:
The substrate holder is designed to serve dual purposes: it functions as both the teaching reference object and the actual substrate holding device during processing. By integrating the reference position marking directly onto the substrate holder rather than using a separate dedicated jig, the system eliminates the need for additional specialized equipment while maintaining teaching accuracy.
Solution Approach 2:
The patent merges the teaching reference function with the substrate holder itself. The optical sensor detects the substrate holder's position directly, and the controller uses this information to determine the reference position. This consolidation eliminates the separate dedicated jig and reduces overall system complexity.
2Measurement precision
If a dedicated jig is used for teaching operations, then teaching accuracy is improved, but maintenance cost increases
Solution Approach 1:
The substrate holder serves as both the processing tool and the teaching reference object. Since the substrate holder is already a necessary component for substrate processing, using it for teaching operations eliminates the need for a separate dedicated jig that would require additional maintenance, thereby reducing overall maintenance costs.
3Measurement precision
If a dedicated jig is used for teaching operations, then teaching accuracy is improved, but operator burden increases
Solution Approach 1:
The patent combines the teaching reference function with the substrate holder, eliminating the need for operators to handle and set up a separate dedicated jig. The optical sensor automatically detects the substrate holder's position, and the controller automatically determines the reference position, reducing manual intervention and operator burden.
4Measurement precision
If a dedicated jig is used for teaching operations, then teaching accuracy is improved, but purchase cost increases
Solution Approach 1:
The substrate holder is designed to perform both substrate processing and teaching reference functions. By eliminating the dedicated jig, the system reduces the number of components that need to be manufactured and purchased, thereby reducing overall equipment costs while maintaining teaching accuracy through the integrated solution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces operator burden and costs by allowing low-cost teaching operations without dedicated jigs, ensuring accurate substrate positioning and reduced maintenance.
Implementation Method 1
a position detector that detects a positional relationship between the substrate held by the first holder and the first holder
Data Source
AI summary
During a teaching operation regarding a transport mechanism, a hand of the transport mechanism is moved to a tentative target position in a substrate supporter, and a substrate supported at a reference position in the substrate supporter is received by the hand. A positional relationship between the substrate held by the hand and the hand is detected. A deviation between the tentative target position and the reference position is acquired as correction information based on the detected positional relationship. During the teaching operation or during substrate processing, the tentative target position is corrected to a true target position to coincide with the reference position based on the acquired correction information. During the substrate processing, the hand is moved to the true target position, so that the substrate is transferred to the substrate supporter by the hand, or the substrate is received from the substrate supporter by the hand.