Substrate Transport Arm With Independent Accessory Feedthrough

Solution Overview

Problem

Conventional substrate transport apparatuses in semiconductor manufacturing face issues with cable flexing causing contamination, slip ring contamination, increased cost, and complexity due to vacuum and electrical feedthroughs, which affect reliability and throughput.

Innovation Solution

A substrate transport apparatus with an independent feedthrough drive that provides electrical and motive power mechanically, eliminating the need for vacuum and electrical feedthroughs between controlled and uncontrolled environments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If vacuum and electrical feedthroughs are used to provide power and control to end effectors, then substrate handling capability is improved, but device complexity and cost increase

Engineering Contradiction:

Improvesubstrate handling capabilityVSAvoiddevice complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the vacuum and electrical feedthroughs from the system by providing power and control signals through the arm links themselves, which are already present structural components. This removes the need for separate feedthrough mechanisms while maintaining the ability to power and control end effectors during substrate transport operations

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The arm links are given multiple functions: they serve both as structural support elements for the substrate transport apparatus and as conduits for providing power and control signals to the end effectors. This eliminates the need for dedicated feedthrough components and reduces overall system complexity

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of operation

If vacuum and electrical feedthroughs are used to provide power and control to end effectors, then substrate handling capability is improved, but cost increases

Engineering Contradiction:

Improvesubstrate handling capabilityVSAvoidcost

Core Design Contradiction:

Ease of operationVSEase of manufacture

Solution Approach 1:

The patent extracts and eliminates the vacuum and electrical feedthroughs from the system by providing power and control signals through the arm links themselves, which are already present structural components. This removes the need for separate feedthrough mechanisms while maintaining the ability to power and control end effectors during substrate transport operations

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The arm links are given multiple functions: they serve both as structural support elements for the substrate transport apparatus and as conduits for providing power and control signals to the end effectors. This eliminates the need for dedicated feedthrough components and reduces overall system complexity

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of operation

If cables are used to provide power and control to end effectors, then substrate handling capability is improved, but contamination generation increases

Engineering Contradiction:

Improvesubstrate handling capabilityVSAvoidcontamination particles

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the traditional cable-based electrical connection system with a mechanical integration approach where power and control are provided through the arm link structure itself. This eliminates cable flexing and associated particulate contamination while maintaining the ability to power and control end effectors during substrate transport

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12544908B2Substrate transport apparatus with independent accessory feedthrough

Publication Date: 2026.02.10 BROOKS AUTOMATION US LLC

AI summary

A substrate transport apparatus including a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.