Substrate Transport Apparatus Rubbing Detection
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Solution Overview
Problem
Existing substrate transport systems in semiconductor manufacturing face challenges in accurately detecting rubbing between wafers and transport robots due to variations in substrate storage container shapes and potential human errors, leading to surface scratches and particle generation.
Innovation Solution
A substrate transport apparatus equipped with a sound amplifying section and a detection system using vibration sensors to detect solid-borne sounds propagating through the substrate holding tool, allowing for precise identification of rubbing between substrates and the transport mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If a vibration sensor is used to detect rubbing between wafer and fork, then detection capability is provided, but detection accuracy is insufficient due to weak rubbing signals and various vibration causes
Solution Approach 1:
The patent introduces a sound amplifying section as an intermediary device between the rubbing contact point and the vibration sensor. This amplifying section magnifies the weak vibration signals generated by rubbing between the wafer and fork, enabling the vibration sensor to detect these previously undetectable weak signals with sufficient accuracy.
Solution Approach 2:
The patent utilizes mechanical vibration principles by employing a vibration sensor to detect vibrational signals. The system converts the mechanical rubbing contact between wafer and fork into detectable vibration signals, and uses the sound amplifying section to enhance these vibration signals for accurate detection.
2Adaptability or versatility
If teaching is performed manually to set fork entry parameters, then adaptability to different containers is achieved, but human error and time consumption increase
Solution Approach 1:
The patent implements self-service by enabling the system to automatically detect and adapt to different substrate storage container configurations through the vibration detection system. Instead of requiring manual teaching, the system autonomously identifies container characteristics and adjusts fork entry parameters accordingly, eliminating human intervention in the teaching process.
Solution Approach 2:
The patent employs feedback mechanisms where the vibration sensor continuously monitors rubbing signals during fork insertion, and this information is fed back to automatically adjust the entry parameters. The system learns from detected vibrations and adapts its operation to prevent future rubbing, creating a closed-loop control system that eliminates manual teaching requirements.
3Ease of operation
If the fork moves back and forth during wafer transfer, then substrate transfer function is fulfilled, but rubbing and surface damage can occur
Solution Approach 1:
The patent applies preliminary action by detecting rubbing signals before significant damage occurs. The vibration sensor monitors the fork insertion process in real-time, and when rubbing is detected through the sound amplifying section, the system can take corrective action immediately to prevent surface scratches and particle generation.
Solution Approach 2:
The patent converts the harmful rubbing contact into a beneficial detection opportunity. By using the vibration signals generated by rubbing as indicators, the system can detect and prevent further damage. The harmful rubbing signal becomes useful information that enables protective action.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively detects rubbing with high accuracy, reducing the likelihood of substrate damage and preventing erroneous detections caused by other vibrations, thereby enhancing the reliability of substrate handling processes.
Implementation Method 1
a detection section for detecting rubbing between a substrate and the support based on a detection signal from a vibration sensor which detects a solid-borne sound, propagating through the substrate holding tool
Data Source
AI summary
A substrate transport apparatus for detecting with high accuracy rubbing between a substrate held in a substrate holding tool, and a support which transports a substrate. The substrate transport apparatus includes: a stage for placing thereon the substrate holding tool; a substrate transport mechanism including the support for the substrate, and a back-and-forth movement mechanism for moving the support, the mechanism configured to transfer a substrate to/from the substrate holding tool; a lifting mechanism for moving the support up and down with respect to the substrate holding tool; a sound amplifying section for amplifying a contact sound generated by contact between a substrate held in the substrate holding tool and the support; and a detection section for detecting rubbing between a substrate and the support based on a detection signal from a vibration sensor which detects a solid-borne sound, propagating through the substrate holding tool, and outputs the detection signal.