Substrate treating apparatus
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Solution Overview
Problem
The existing substrate treating apparatuses face challenges in maintaining airtightness, especially when subjected to high temperatures or pressure differences, leading to potential contamination and reduced treatment efficacy.
Innovation Solution
A substrate treating apparatus with a treatment container, a shaft member, a seal housing, and a seal member that allows for enhanced airtightness by using a seal member made of metal and a cooling unit to prevent seal degradation, while also controlling the atmosphere and pressure within the container.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional seal member (e.g., O-ring) is used in the through holes, then the device complexity is reduced and ease of manufacture is improved, but the airtightness of the treating space deteriorates under high temperature or pressure difference conditions
Solution Approach 1:
The seal member material is changed from conventional elastomeric material to metal material, fundamentally changing the material parameter to maintain sealing performance under high temperature and pressure difference conditions. The metal seal member can withstand extreme conditions without degradation, ensuring reliable airtightness of the treating space.
Solution Approach 2:
The sealing mechanism employs a composite structure combining metal seal member with cooling unit and coolant system. This composite approach integrates multiple materials (metal, coolant fluid) and mechanisms to achieve both high-temperature resistance and sealing functionality, resolving the contradiction between reliability and simplicity.
2Temperature
If the plate heats the substrate at high temperature, then the treatment efficacy is improved, but the seal member degrades and airtightness is compromised
Solution Approach 1:
The cooling unit is activated before and during the high-temperature heating process to preemptively cool the metal seal member. This preliminary cooling action prevents the seal member from being exposed to degrading temperatures, allowing the plate to heat the substrate to high temperatures without compromising seal integrity.
Solution Approach 2:
The cooling unit acts as an intermediary between the heat source (plate) and the seal member. It introduces coolant as a mediating substance that absorbs heat and protects the seal member from direct thermal exposure, enabling high-temperature treatment while maintaining sealing reliability.
3Object-affected harmful factors
If the treating space is sealed tightly, then contamination is prevented, but pressure differences cause seal member failure
Solution Approach 1:
The seal member material is changed to metal, which has superior mechanical strength and pressure resistance compared to conventional elastomeric materials. This parameter change allows the seal to withstand high pressure differences while maintaining tight sealing for contamination prevention.
Solution Approach 2:
The cooling unit applies localized cooling specifically to the seal member region, creating a local temperature gradient that strengthens the seal material in the high-stress area. This local quality enhancement allows the seal to resist pressure differences without compromising overall sealing performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains airtightness and control over the treatment environment, preventing contamination and ensuring the quality of substrate treatment by using a metal seal member and cooling unit to manage temperature and pressure.
Implementation Method 1
a cooling unit configured to cool the seal member
Implementation Method 2
The plate heats the substrate placed on the plate
Data Source
AI summary
Disclosed is a substrate treating apparatus including a treatment container, a pin, a seal housing, a seal member, and an exhaust port. The treatment container includes an opening. The pin is disposed between an interior of the treatment container and an exterior of the treatment container through the opening, and is configured to reciprocate along an axis thereof. The seal housing is disposed in the exterior of the treatment container. The seal housing is in close contact with the treatment container around the opening, and accommodates a part of the pin. The seal member is in close contact with an inner peripheral surface of the seal housing, and in close contact with an outer peripheral surface of the pin so as to be slidable relative to the pin. The exhaust port is in connection with the seal housing in a communicated manner.