Substrate Treating Apparatus With Segmented Exhaust And Movable Cup
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Solution Overview
Problem
Current substrate treatment apparatuses face challenges in maintaining a clean atmosphere due to the mixing of mist from different developing solutions within a single exhaust pipeline, leading to difficulties in achieving high-quality substrate treatment.
Innovation Solution
A substrate treating apparatus is designed with an interior and exterior cup system, where each cup has separate drain and exhaust outlets, and a movable annular member ensures that processing liquids and gases are collected and exhausted separately, preventing mixture and enhancing treatment quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single exhaust pipeline is used to exhaust gas from the cup body, then the device complexity is reduced, but the mist of different developing solutions mixes within the exhaust pipeline, leading to contamination and reduced manufacturing precision
Solution Approach 1:
The exhaust system is segmented into multiple independent exhaust pipelines (first exhaust pipeline and second exhaust pipeline) corresponding to different developing solution types. This segmentation prevents mixing of mist from different developing solutions, thereby maintaining substrate treatment quality while managing device complexity through functional separation.
2Quantity of substance
If the interior cup collects processing liquid, then the collection efficiency is improved, but the weight and load of the interior cup increases, reducing the speed of movement
Solution Approach 1:
The interior cup is designed as a movable component that can dynamically adjust its position between a liquid collection position and an upper position. This dynamic design allows the system to optimize between liquid collection efficiency and movement speed by positioning the cup appropriately based on operational requirements, reducing unnecessary weight load during movement while maintaining collection capability when needed.
Data Source
AI summary
Disclosed is a substrate treating apparatus that treats a substrate with processing liquids. The apparatus includes a substrate holder, an exterior cup, and an interior cup. The interior cup includes an interior cup body, and an interior cup outlet. The exterior cup includes an exterior cup body, an exterior bottom cup, a first drain outlet, a first exhaust port, a second drain outlet, a second exhaust port, and a separation partition. The apparatus further includes an annular member movable upwardly/downwardly, and a drive unit that causes the annular member to move to shift the interior cup body between a collecting position and a retracting position.