Substrate Treating Apparatus Calibration with Dual Vision Units
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in precisely calibrating the discharge location of chemicals onto densely packed pixels in high-resolution display elements, as current methods require combining multiple images and can result in image distortion and calibration errors due to misalignment of movement axes.
Innovation Solution
A substrate treating apparatus with a support unit, a first vision unit that photographs a calibration board in real-time, and a second vision unit that uses a line scan scheme, along with a controller to align movement axes and calculate signal calibration values, ensuring precise calibration of the discharge location and image alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the area to which chemical is discharged is divided and photographed by the second vision unit, then the photographing range restriction is overcome, but image distortion occurs during the process of combining multiple images
Solution Approach 1:
The patent divides the calibration board into multiple regions, each containing alignment marks at specific intervals. The second vision unit photographs these segmented regions separately, and the controller combines the photographs to create a complete calibration image. This segmentation allows covering a large area while maintaining image quality through controlled combination.
Solution Approach 2:
The calibration board with its specific alignment marks serves as an intermediary reference object. It mediates between the vision unit's photographing capability and the requirement for precise calibration. The alignment marks on the calibration board provide stable reference points that enable accurate combination of multiple images without distortion.
2Measurement precision
If the discharge location of chemical is calibrated using a second substrate with a second alignment mark, then the discharge location can be calibrated, but calibration error occurs when the movement axis of the second substrate is not precisely aligned
Solution Approach 1:
The patent creates a virtual copy of the calibration process by photographing the calibration board's alignment marks through the vision unit. Instead of physically aligning substrates, the system captures images of the calibration board's marks and uses these images to determine discharge location calibration, eliminating the need for physical substrate alignment.
Solution Approach 2:
The patent replaces the mechanical alignment process (physically aligning substrates and movement axes) with an optical measurement process. The vision unit captures images of alignment marks on the calibration board, and the controller processes these images to determine calibration parameters, substituting mechanical precision requirements with optical measurement capabilities.
3Area of stationary object
If multiple images are combined to identify striking point, then the photographing range is extended, but the process complexity and time consumption increase
Solution Approach 1:
The calibration board is prepared in advance with multiple alignment marks positioned at specific intervals across the entire calibration area. This preliminary arrangement allows the second vision unit to capture all necessary calibration information in a single photographing sequence without needing to combine multiple separate images, thereby reducing calibration time.
Data Source
AI summary
Disclosed is a substrate treating apparatus. The inventive concept includes a support unit having a plate that supports a calibration board, on which a plurality of alignment marks are displayed, a first vision unit configured such that a relative location with respect to the plate is changeable, and that photographs the calibration board, and a second vision unit that photographs the calibration board in a scheme that is different from that of the first vision unit.