Substrate Treating Apparatus Power Failure After-Treatment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
During semiconductor device manufacturing, power failures or fires can cause substrates to be damaged, and after-treatment processes are complicated due to the shutdown of robots and facilities, making it difficult to recover and resume operations safely.
Innovation Solution
A substrate treating apparatus and method that includes a treating module with process chambers and a transfer robot, along with an index module for substrate transfer, which performs power failure after-treatment operations by completing transfer cycles, moving robots to safety positions, closing container doors, and maintaining power until standby time passes, using a power failure detection sensor to control the emergency unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If the substrate treating apparatus stops operation when power failure occurs, then energy consumption is reduced, but substrate damage and facility contamination increase
Solution Approach 1:
The emergency unit performs preliminary actions by detecting power failure and automatically executing after-treatment operations before substrate damage or contamination can occur. The system proactively completes transfer cycles, closes container doors, and positions robots to safety before the harmful effects of power failure manifest, thus protecting substrates and facilities while managing energy consumption.
2Object-affected harmful factors
If after-treatment operations are performed during power failure, then substrate protection is improved, but operation complexity increases
Solution Approach 1:
The emergency unit enables the substrate treating apparatus to serve itself during power failure by automatically detecting the emergency condition and executing predetermined after-treatment operations without external intervention. The system self-manages the protection process by completing transfer cycles, closing doors, and positioning components, thereby reducing operational complexity while maintaining substrate protection.
3Reliability
If robots continue transfer operations during power failure, then substrate transfer completion is improved, but energy consumption increases
Solution Approach 1:
The emergency unit applies partial action by allowing robots to complete only the necessary transfer cycles required for substrate protection, rather than continuing full operational sequences. The system performs the minimum required transfers to reach safe states and positions, avoiding excessive energy consumption while ensuring substrate transfer completion and protection.
Data Source
AI summary
A method for treating a substrate using a substrate treating apparatus that includes a treating module and an index module that transfers the substrate between a container and the treating module, in which a plurality of process chambers and a main transfer robot are provided in the treating module and a container mounting table and an index robot that transfers the substrate between the container and the treating module are provided in the index module, includes executing a power failure after-treatment operation and thereafter stopping an operation of the substrate treating apparatus when a power failure occurs in the substrate treating apparatus. When the main transfer robot or the index robot is transferring the substrate in the event of the power failure, the power failure after-treatment operation includes an operation of continually maintaining the transfer of the main transfer robot or the index robot until the transfer is completed.