Substrate Treating Liquid Solidification for Pattern Collapse Prevention
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Solution Overview
Problem
Existing substrate drying technologies face challenges in reducing pattern collapse due to surface tension and incur high costs due to the use of expensive sublimable substances with high purity and vapor pressure requirements.
Innovation Solution
A substrate treating method using a substrate treating liquid with a sublimable substance in a molten state and a solvent, where the sublimable substance has a higher freezing point than the liquid, allowing excessive sublimable substance to settle and solidify, forming a solidified body that minimizes surface tension influence and reduces the amount of sublimable substance used.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a sublimable substance is used as a support member to prevent pattern collapse, then pattern collapse is reduced, but the cost increases due to high purity and vapor pressure requirements
Solution Approach 1:
The invention changes the physical state parameter of the sublimable substance from solid to molten state before application. By applying the substance in molten state and then solidifying it on the substrate, the invention achieves effective pattern support while using lower purity materials, thus reducing cost while maintaining reliability
Solution Approach 2:
The invention utilizes phase transitions of the sublimable substance (solid→liquid→solid) to achieve the drying function. The substance is heated to melt, applied in liquid state, then cooled to solidify as a support member, and finally sublimed to remove. This phase transition approach enables cost-effective pattern collapse prevention
2Reliability
If a sublimable substance is used to prevent pattern collapse, then pattern collapse is reduced, but the amount of substance required is large, increasing cost
Solution Approach 1:
By changing the application state to molten/liquid, the invention achieves better coverage and penetration into pattern recesses with smaller amounts of substance. The liquid state allows the substance to flow into and fill fine patterns more effectively, reducing the total quantity needed while maintaining pattern support effectiveness
3Reliability
If a sublimable substance is used as a support member, then pattern collapse is prevented, but residue is generated on the substrate
Solution Approach 1:
The invention utilizes the sublimation phase transition to remove the support member completely from the substrate. By controlling the sublimation process, the substance transitions directly from solid to gas, leaving minimal or no residue on the substrate while having served its purpose as a pattern support member during drying
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces pattern collapse and minimizes residue while lowering the amount of sublimable substance required, thereby reducing costs and improving drying efficiency.
Implementation Method 1
a solidification step of solidifying the substrate treating liquid on the pattern-formed surface so as to form a solidified body
Implementation Method 2
a sublimation step of subliming the solidified body so as to remove the solidified body from the pattern-formed surface
Implementation Method 3
an excessive amount of the sublimable substance whose density is higher than a density of the substrate treating liquid is settled
Data Source
AI summary
A substrate treating method, liquid and apparatus are provided which can reduce the amount of sublimable substance used for the drying of a substrate while reducing the collapse of pattern. The substrate treating method includes a step of supplying a liquid to the pattern-formed surface of the substrate, a step of solidifying the liquid on the pattern-formed surface to form a solidified body and a step of subliming the solidified body so as to remove it from the pattern-formed surface. The substrate treating liquid includes a molten sublimable substance and a solvent, the freezing point of the sublimable substance being higher than the freezing point of the solvent. When the sublimable substance and the solvent are separated, the sublimable substance is settled and in the solidification step, the settled sublimable substance is solidified to have a height equal to or higher than the height of a pattern.