Substrate Treating via Sublimable Solidified Body
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Solution Overview
Problem
Existing dry technologies fail to prevent pattern collapse on substrates with fine and high aspect ratio patterns during the drying process due to surface tension and organic substance precipitation.
Innovation Solution
A substrate treating method involving a process liquid with a sublimable substance that solidifies on the substrate, sublimates without going through a liquid phase, and includes an organic substance removal step to prevent pattern collapse by removing precipitated organic substances before they aggregate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional dry processing is performed to remove liquids from substrates, then the substrate is dried, but surface tension causes pattern collapse on fine high aspect ratio patterns
Solution Approach 1:
The patent applies phase transition by using a sublimable substance that transitions directly from solid to gas phase, bypassing the liquid phase. This eliminates surface tension effects that occur during liquid drying, thereby preventing pattern collapse on fine high aspect ratio structures while achieving complete drying of the substrate
Solution Approach 2:
The patent changes the physical parameters of the drying process by controlling temperature and pressure conditions to enable sublimation. By maintaining conditions where the sublimable substance transitions directly from solid to gas without forming a liquid phase, the harmful surface tension effects are eliminated while achieving effective drying
2Manufacturing precision
If a sublimable substance is used to prevent surface tension effects, then pattern collapse is reduced, but organic substances precipitate and aggregate causing new pattern collapse
Solution Approach 1:
The patent converts the harmful effect of organic substance precipitation into a beneficial process by using it as an indicator. The precipitation and aggregation of organic substances on the sublimation interface provides visual or detectable signals that allow real-time monitoring and control of the sublimation process, enabling optimization to prevent actual pattern collapse while maintaining the benefits of sublimation drying
3Manufacturing precision
If washing and rinse processing are performed to remove contaminants, then substrate cleanliness is improved, but liquid adhesion requires subsequent dry processing that risks pattern collapse
Solution Approach 1:
The patent replaces conventional liquid-phase drying with solid-to-gas phase transition (sublimation). The sublimable substance is applied after washing and rinse processing, then sublimes directly without forming a liquid phase, thereby removing all adhered liquids and the sublimable substance itself without causing surface tension-induced pattern collapse
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces pattern collapse by preventing surface tension effects and organic substance-induced gravity on the substrate, allowing for efficient drying of substrates with fine patterns.
Implementation Method 1
a sublimable substance which is at least any of a methacrylic resin material, a styrene resin material and a fluorocarbon material... the solution is changed into a solid, in which the solid is used as a support member (solidified body) for the pattern and in which the support member is removed by being changed from a solid phase to a gas phase without the intervention of a liquid phase
Implementation Method 2
surface tension that acts on a boundary surface between a liquid such as a washing liquid or a rinse liquid entering a concave portion in the pattern and a gas in contact with the liquid pulls and collapses the adjacent convex portions in the pattern... since surface tension does not act on a boundary surface between a solid and a gas in contact with the solid, it is possible to reduce the collapse of a pattern caused by surface tension
Implementation Method 3
an organic substance removal step of removing, when the solidified body is sublimed, an organic substance precipitated on a sublimation interface of the solidified body
Data Source
AI summary
A substrate treating method and a substrate treating apparatus which can reduce the collapse of a pattern on a substrate. The substrate treating method includes a supply step of supplying a process liquid including a sublimable substance in a molten state to a pattern-formed surface of a substrate; a solidification step of solidifying the process liquid on the pattern-formed surface so as to form a solidified body; a sublimation step of subliming the solidified body so as to remove the solidified body from the pattern-formed surface; and an organic substance removal step of removing, when the solidified body is sublimed, an organic substance precipitated on a sublimation interface, and the organic substance removal step is performed so as to overlap at least part of the sublimation step.