Substrate Treating System Segmented Static Discharge
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Solution Overview
Problem
Conventional substrate cleaning systems in semiconductor manufacturing fail to efficiently remove static electricity across a wide area, leading to uneven electric fields and residual static charges, which can cause pattern damage during the manufacturing process.
Innovation Solution
A substrate treating system with conductive parts of varying resistances, including a substrate support member, main transferring robot, buffer unit, and index robot, all made of electrically conductive materials, are designed to sequentially increase static electricity removal capacity by contacting the substrate and discharging static electricity to the outside through a ground line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional ion generator is used to remove static electricity, then static electricity can be removed to some extent, but the static electricity removal is inefficient and cannot cover a wide area effectively
Solution Approach 1:
The system divides the static electricity removal function into multiple conductive parts (first conductive part on substrate support member, second conductive part on main transferring robot, third conductive part on buffer unit, fourth conductive part on index robot) distributed across different locations and units, enabling wide-area coverage through segmented action points
2Reliability
If electrically conductive material is used at substrate contact points to remove static electricity, then much static electricity can be discharged, but static electricity remains undischarged after a specific amount is removed
Solution Approach 1:
The system segments the static electricity removal process into multiple stages with four distinct conductive parts, each capable of discharging static electricity independently, allowing continuous removal throughout the substrate handling cycle
Solution Approach 2:
The conductive parts are positioned at different units (substrate support member, main transferring robot, buffer unit, index robot) that operate in periodic sequence, providing repeated opportunities for static electricity discharge at each contact point throughout the substrate processing cycle
3Reliability
If multiple conductive parts with different resistances are used to remove static electricity by stages, then static electricity can be removed more effectively, but the device complexity increases
Solution Approach 1:
Each conductive part serves multiple functions: it provides electrical contact with the substrate, acts as a discharge path for static electricity, and is integrated into the structural components (substrate support member, robot blades, buffer unit slot) that already perform substrate handling functions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively removes static electricity by stages, reducing pattern damage from instantaneous charge differences and enhancing the overall static electricity removal effect, ensuring higher cleanliness and process efficiency.
Implementation Method 1
each of the index robot, the substrate treating apparatuses, the main transferring robot, and the buffer unit includes a conductive part contacting the substrate to remove static electricity of the substrate
Implementation Method 2
designed to sequentially increase static electricity removal capacity by contacting the substrate and discharging static electricity to the outside through a ground line
Data Source
AI summary
Disclosed is a substrate treating system. The substrate treating system includes an index unit having a port, on which a container containing a substrate is positioned, and an index robot, a process executing unit having substrate treating apparatuses for treating the substrate and a main transferring robot for transferring the substrate, and a buffer unit disposed between the process executing unit and the index unit and in which the substrate fed between the process executing unit and the index unit temporarily stays. Each of the index robot, the substrate treating apparatuses, the main transferring robot, and the buffer unit includes a conductive part contacting the substrate to remove static electricity of the substrate.