Substrate Treatment Imaging for Recipe-Synchronized Abnormality Detection
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Solution Overview
Problem
Current substrate treating apparatuses struggle with inaccurate abnormality detection during operation due to differences in imaging conditions, leading to potential improper treatment of substrates.
Innovation Solution
A substrate treating apparatus that synchronizes real-time imaging with design information using a recipe, comparing real images with pre-simulated normal images to detect abnormalities accurately, and includes features like a spin chuck, nozzles, and a fluid simulator to enhance detection capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If normal video data is stored in advance for abnormality detection, then abnormality can be detected during operation, but detection accuracy deteriorates when imaging conditions differ between stored and actual video data
Solution Approach 1:
The patent performs preliminary simulation of normal operation states and stores reference video images before actual operation. The imaging conditions (lighting, angles, positions) are predetermined and matched between reference and actual imaging, ensuring that when abnormality detection is performed during operation, the comparison is made under consistent conditions, thereby maintaining high detection accuracy
Solution Approach 2:
The patent changes the parameter of imaging condition consistency by synchronizing the imaging conditions between reference video images (obtained through simulation) and actual video images. This ensures that parameters such as lighting conditions, camera angles, and component positions are matched, eliminating the accuracy deterioration caused by condition differences
2Ease of manufacture
If video images are compared after abnormality occurrence to identify causes, then cause identification is effective, but continuous improper treatment may occur before detection
Solution Approach 1:
The patent implements real-time feedback by continuously comparing actual video images with reference video images during operation. When deviations are detected, the system immediately identifies abnormalities and can trigger alerts or corrective actions, preventing continuous improper treatment rather than waiting for post-operation analysis
Solution Approach 2:
By pre-storing reference video images that represent normal operation states under various conditions, the system enables immediate abnormality detection during operation. This preliminary preparation allows for real-time monitoring and immediate identification of deviations, ensuring operational safety before problems escalate
3Measurement precision
If real-time image comparison is performed with synchronized recipe operation, then accurate abnormality detection is achieved, but device complexity increases
Solution Approach 1:
The patent creates virtual copies of normal operation states through simulation, storing these as reference video images. This copying approach allows direct comparison with actual operation without requiring complex physical test setups or multiple sensing systems, achieving accurate detection while controlling complexity
Solution Approach 2:
The imaging unit serves multiple functions: it captures reference images during simulation, captures actual images during operation, and provides images for both abnormality detection and cause analysis. This multi-functionality reduces the need for separate systems, thereby controlling overall device complexity while maintaining high detection accuracy
Data Source
AI summary
Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a recipe memory unit configured to store a recipe; an imaging unit provided at a predetermined location and configured to image the component as a real image at work; a normal image memory unit configured to simulate a condition in advance where the component normally operates in response to the recipe and store in advance a normal image at this time in a view from the location in accordance with three-dimensional design information of the substrate treating apparatus; an operation controller configured to cause the predetermined treatment to be performed; and an abnormality detecting unit configured to detect an abnormality in accordance with a difference between the normal image synchronized with operation of the recipe and the real image.