Substrate Surface Treatment Device Mist Recirculation
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Solution Overview
Problem
Existing substrate surface treatment devices waste treatment liquid as it adheres to chamber walls and accumulates, rather than being reused for surface treatment.
Innovation Solution
A substrate surface treatment device with a mist generator, treatment chamber, and circulation path that recirculates non-adhering mist to reuse the treatment liquid, allowing efficient surface treatment by reintroducing it into the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If mist is introduced into the treatment chamber for surface treatment, then the treatment surface of the substrate can be treated, but the mist that does not adhere to the substrate accumulates in the chamber and is discharged as waste
Solution Approach 1:
The patent recovers the treatment liquid that accumulates in the treatment chamber by installing a collection mechanism that gathers the liquid from the chamber bottom and returns it to the mist generator. This allows the treatment liquid to be reused multiple times instead of being discharged as waste, directly addressing the contradiction between achieving surface treatment and preventing substance loss.
Solution Approach 2:
The system maintains continuous circulation of the treatment liquid through the chamber by collecting accumulated liquid and continuously replenishing it to the mist generator. This ensures the treatment process can continue indefinitely without interrupting for liquid replacement, resolving the contradiction between maintaining treatment effectiveness and preventing waste accumulation.
2Productivity
If treatment liquid is continuously supplied to maintain treatment efficiency, then surface treatment quality is maintained, but the cost of treatment liquid consumption increases
Solution Approach 1:
The patent implements a recovery system that collects treatment liquid accumulating in the treatment chamber and returns it to the mist generator. This circulation mechanism allows the same treatment liquid to be reused multiple times, significantly reducing the quantity of fresh treatment liquid needed while maintaining continuous treatment efficiency.
Solution Approach 2:
The system performs self-service by automatically collecting and recirculating its own treatment liquid through an integrated circulation path. The treatment liquid serves its own function of being replenished and reused without external intervention, reducing the need for continuous external supply while maintaining treatment productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables cost-effective surface treatment by reusing the treatment liquid, reducing waste and maintaining treatment efficiency through controlled recirculation and carrier gas selection.
Implementation Method 1
a mist generator configured to generate a mist of the treatment liquid
Implementation Method 2
cause the introduced mist to adhere to the treatment surface of the substrate
Data Source
AI summary
Provided is a surface treatment device capable of performing surface treatment on a treatment surface of a substrate at low cost by reusing a mist of a treatment liquid introduced into a treatment chamber. The surface treatment device is a device for surface treatment of a substrate by causing a treatment liquid to adhere to the treatment surface of the substrate. The surface treatment device includes a mist generator that generates a mist of the treatment liquid; a treatment chamber that introduces the mist generated by the mist generator and causes the introduced mist to adhere to the treatment surface of the substrate; and a circulation path that circulates the mist discharged from the treatment chamber to the treatment chamber together with the mist generated by the mist generator.