Substrate Trench Heater for Uniform Heating
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Solution Overview
Problem
Existing electric heaters face issues with uneven surface deposition of functional layers due to substrate features, leading to non-uniform heating performance and compromised dielectric integrity from excessive material removal during planarization processes.
Innovation Solution
The method involves forming trenches in a substrate, depositing resistive heating elements within these trenches, and using a bonding and routing layer structure with terminal pins to create a more uniform and functional electric heater, allowing for varied thickness and material deposition to achieve uniform heating zones and improved dielectric integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If a planarization process is performed to flatten the deposited film surface, then surface uniformity is improved, but excessive material is removed causing thickness deviation and compromised dielectric integrity
Solution Approach 1:
The substrate surface is pre-treated by forming trenches and filling them with functional material before depositing the dielectric layer. This preliminary action creates a compensated surface topology that eliminates the need for aggressive planarization, allowing the dielectric layer to be deposited at its designed thickness without excessive material removal
Solution Approach 2:
The substrate surface is made non-uniform by creating trenches in specific locations where functional heating elements are needed. This local modification allows the deposited functional material to fill only where required, creating a uniformly thick dielectric layer over the entire surface while maintaining the desired local heating functionality
2Shape
If functional layers are deposited to compensate for substrate unevenness, then surface uniformity is improved, but material waste increases and cost rises
Solution Approach 1:
Instead of uniformly depositing functional material across the entire substrate surface, trenches are formed only in specific locations where heating elements are required. The functional material is then deposited only into these trenches, eliminating waste while achieving the desired surface uniformity for dielectric layer deposition
3Shape
If the dielectric layer thickness is reduced to accommodate surface variations, then surface uniformity is improved, but dielectric integrity is compromised
Solution Approach 1:
The substrate is pre-modified by forming trenches and filling them with functional material before dielectric layer deposition. This preliminary action creates a compensated surface that allows the dielectric layer to be deposited at its full designed thickness without needing to be thinned, thereby maintaining dielectric integrity while achieving surface uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in electric heaters with a more uniform structure and performance, maintaining dielectric integrity while enabling variable wattage and material properties along the resistive heating element, enhancing overall heating efficiency.
Implementation Method 1
resistive heating layer disposed on the dielectric layer
Data Source
AI summary
A method of constructing a heater includes providing a substrate, forming at least one trench into the substrate, depositing a functional material onto the substrate and into the at least one trench to form a functional element, and providing an electrical termination in contact with the functional element.