Substrate Posture Turning Unit With Movable Vertical Holders
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in efficiently turning the posture of substrates from vertical to horizontal, particularly when the posture turning unit needs to receive substrates while maintaining access from a side adjacent to a vertical holder, which can lead to inefficiencies and potential contamination.
Innovation Solution
A substrate treating apparatus is designed with a posture turning mechanism that includes a substrate holder and a posture turning unit, featuring horizontal and vertical holders, an opening and closing portion, and a longitudinal rotator, allowing the unit to rotate and position substrates from vertical to horizontal, enabling the horizontal substrate transport mechanism to access the substrates from the side of the vertical holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the posture turning unit receives substrates while turning them from vertical to horizontal, then the substrate processing efficiency is improved, but the horizontal substrate transport mechanism cannot access the posture turning unit from the side adjacent to the vertical holder
Solution Approach 1:
The posture turning unit is designed with movable vertical holders that can dynamically change position between a holding position (where substrates are held) and a passing position (where substrates can pass through). This dynamic reconfiguration allows the horizontal substrate transport mechanism to access the posture turning unit from the side adjacent to the vertical holder, resolving the accessibility issue while maintaining processing efficiency
Solution Approach 2:
The posture turning unit is divided into separate functional components: vertical holders for holding substrates in vertical posture, horizontal holders for holding substrates in horizontal posture, and an opening and closing portion that controls substrate transfer. This segmentation allows independent operation of each component, enabling the horizontal transport mechanism to access the unit while substrate turning is performed
2Reliability
If the vertical holders are positioned to hold substrates, then substrate holding is secure, but the horizontal substrate transport mechanism cannot access the posture turning unit from the side
Solution Approach 1:
The vertical holders are designed to be movable between a holding position (providing secure substrate holding) and a passing position (allowing side access for the horizontal transport mechanism). This dynamic positioning resolves the contradiction between secure holding and side accessibility by allowing the system to switch between these two states as needed
Data Source
AI summary
A posture turning unit of a substrate treating apparatus includes two horizontal holders configured to place a plurality of substrates when the substrates are in a horizontal posture, two vertical holders provided below the horizontal holders and configured to hold the substrates in a vertical posture when the substrates are in the vertical posture, an opening and closing portion configured to move the two vertical holders between a holding position and a passing position, a supporting portion configured to support the two horizontal holders and the two vertical holders, a longitudinal rotator configured to rotate the supporting portion around a horizontal axis so as to direct the two vertical holders to the horizontal substrate transport mechanism, and a moving unit configured to move the supporting portion and the longitudinal rotator. When a posture of the substrates is turned to horizontal, the opening and closing portion moves the two vertical holders to into the passing position.