Substrate Posture Turning with Rotating Holders for Shift-Free Release
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in releasing the holding of substrates by vertical holders without using an edge abutment part, leading to potential positional shifts during posture changes.
Innovation Solution
A substrate treating apparatus with a posture turning mechanism that includes vertical holders with rotating members, allowing for the release of substrates by rotating the holder bodies to change between holding and releasing states, and a support base that rotates around a horizontal axis to turn substrates from vertical to horizontal, minimizing positional shifts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the edge abutment part is used to release substrate holding, then the substrates can be released from vertical holders, but the apparatus structure becomes more complex and substrate positional shifts may occur during posture changes
Solution Approach 1:
The invention extracts and eliminates the edge abutment part from the apparatus structure. Instead of using the edge abutment part to release substrate holding, the patent employs the vertical holders themselves to perform the release function through rotational movement, thereby simplifying the overall apparatus structure while maintaining substrate release capability
Solution Approach 2:
The vertical holders are designed to perform multiple functions: they not only hold substrates in vertical posture but also release substrates through rotational movement. This multi-functionality eliminates the need for separate edge abutment parts, reducing structural complexity while maintaining operational capability
2Reliability
If the vertical holders maintain fixed gripping during posture change, then substrate positioning is stable, but the holders cannot release substrates without edge abutment part
Solution Approach 1:
The vertical holders are designed with dynamic capability to change their gripping state. By rotating the holder body around the rotating member, the holders can transition between a gripping state (when holding grooves engage substrates) and a releasing state (when rotation moves holding grooves away from substrates), enabling substrate release without edge abutment parts while maintaining positioning stability during fixed posture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively releases substrate holding without causing positional shifts, maintains compactness, and prevents substrate drying, ensuring stable and efficient substrate handling.
Implementation Method 1
a support base rotator configured to rotate the support base around a horizontal axis
Implementation Method 2
the state changing unit changes a state of the two vertical holders to either the holding state or the releasing state by causing the first holder body and the second holder body to rotate around the first rotating member and the second rotating member, respectively
Data Source
AI summary
Disclosed is a substrate treating apparatus provided with a posture turning unit. The posture turning unit includes a first vertical holder having a first rotating member and a first holder body provided so as to protrude from the first rotating member. The posture turning unit also includes a second vertical holder having a second rotating member and a second holder body provided so as to protrude from the second rotating member. A rotation driving unit rotates the two holder bodies around the two rotating members, respectively, whereby the two vertical holders are changed into a holding state or a releasing state. When a posture of substrates is turned to horizontal by a support base rotator, the rotation driving unit changes a state of the two vertical holders into the releasing state, whereby the substrates are released from the two holder bodies.