Substrate Processing Unit Monitoring with Scored Time-Series Displays
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Solution Overview
Problem
In substrate processing, operators face difficulty in ascertaining the state of multiple processing units due to the complexity of analyzing time-series data from various sensors, making it challenging to identify abnormalities and their causes.
Innovation Solution
A data processing method that compares time-series data with reference data to evaluate and classify it into levels, displaying an evaluation result screen with graphs showing occurrence rates and temporal changes, allowing for easy identification of abnormal units and their performance trends.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If all time-series data from multiple processing units is displayed on a single screen, then complete information is provided, but the complexity of the display increases making it difficult for operators to ascertain the state of the apparatus
Solution Approach 1:
The display screen is divided into multiple regions, with each region showing time-series data from a specific processing unit. This segmentation allows operators to view complete information from all processing units while maintaining a clear, organized layout that reduces display complexity and improves readability.
2Measurement precision
If detailed time-series data from all processing units is presented, then comprehensive analysis is possible, but the time required to identify abnormalities increases
Solution Approach 1:
The system pre-calculates and displays evaluation results that indicate the degree of abnormality for each processing unit before detailed analysis is required. This preliminary information allows operators to quickly identify which processing units have abnormalities, reducing the time needed to locate issues while maintaining the ability to perform detailed analysis when needed.
Solution Approach 2:
The display uses color coding to indicate the degree of abnormality in each processing unit, with different colors representing different levels of deviation from normal operation. This visual encoding allows operators to rapidly identify abnormal processing units at a glance without having to analyze numerical data, significantly reducing the time to detect abnormalities while preserving detailed analysis capabilities.
3Reliability
If multiple graphs and data points are displayed to show all processing unit states, then complete monitoring is achieved, but the ease of operation decreases as operators cannot easily ascertain apparatus state
Solution Approach 1:
The display is segmented into distinct regions, each dedicated to a specific processing unit. Within each region, time-series data is organized in a consistent, easy-to-read format. This segmentation maintains complete monitoring coverage while improving ease of operation by allowing operators to systematically review each processing unit's state without being overwhelmed by a cluttered display.
Solution Approach 2:
Color indicators are used to represent the operational state of each processing unit, providing an immediate visual summary that complements the detailed time-series data. This dual approach ensures complete monitoring while significantly improving ease of operation, as operators can quickly assess the overall apparatus state through color coding before examining detailed data if needed.
Data Source
AI summary
A data processing method includes a step of obtaining scores of time-series data by comparing the time-series data with reference data in order to process time-series data acquired in a substrate processing apparatus having one or more processing units, a step of classifying the scores into a plurality of levels, and a step of displaying an evaluation result screen including a display area including a graph showing an occurrence rate of each level of the scores, the number of occurrences of each level, and a graph showing temporal change in the number of occurrences of a worst level of the scores when substrates have been processed through a predetermined method with respect to each of the two or more processing units. Accordingly, a data processing method through which a state of the substrate processing apparatus can be easily ascertained is provided.