Substrate Storage Valve Structure for Bidirectional Gas Sealing
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Solution Overview
Problem
Substrate storage containers with metal-based valve bodies face corrosion issues due to residual substances and are limited to unidirectional gas flow, which can lead to contamination and inefficiency.
Innovation Solution
A substrate storage container with a valve body that uses a non-metallic design, featuring a cylindrical structure with a plug member and an elastic body for bidirectional gas control, eliminating the need for metal components and preventing corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a metal elastic member is used in the valve body, then the valve can control gas flow effectively, but the metal member becomes corroded by residual substances discharged with the gas
Solution Approach 1:
The invention extracts and removes the metal elastic member from the valve body, replacing it with a non-metallic elastic body. This eliminates the source of corrosion while maintaining the valve's gas flow control function through the non-metallic elastic member that is resistant to residual substances.
Solution Approach 2:
The invention changes the material parameter of the elastic member from metal to non-metallic material. This parameter change maintains the elastic deformation capability needed for valve operation while providing resistance to corrosion from residual substances in the gas stream.
2Device complexity
If a unidirectional check valve is used, then the valve structure is simple, but the gas flow can only be controlled in one direction requiring multiple valve bodies for bidirectional control
Solution Approach 1:
The invention designs the valve body with a single structure that can control gas flow in both directions. The elastic member is positioned and configured to respond to pressure differences from either direction, enabling one valve body to replace what would traditionally require multiple unidirectional valves, thus reducing overall system complexity while increasing versatility.
3Productivity
If residual substances are discharged with the gas, then the processing function is completed, but the substances cause corrosion and contamination of the valve body
Solution Approach 1:
The invention converts the harmful effect of residual substances by replacing the metal elastic member with a non-metallic elastic body that is inherently resistant to corrosion and contamination from these substances. This material substitution transforms the previously harmful environment into a compatible operating condition for the valve components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively controls gas flow in both directions without metal corrosion, ensuring airtight storage and preventing contamination, while maintaining humidity levels comparable to conventional systems.
Implementation Method 1
when a positive pressure is applied to either the first cylindrical portion or the second cylindrical portion, the elastic body may expand to form a gap with the plug member which allows gas to flow to the container body
Implementation Method 2
when a positive pressure is not applied to the first cylindrical portion or the second cylindrical portion, the elastic body may be in close contact with the plug member and gas flow to the container body is blocked
Data Source
AI summary
A substrate storage container is provided with a valve body attached thereto which includes a first cylindrical portion having one end communicating with the outside of a container body, a second cylindrical portion having one end communicating with the interior of the container body and spaced apart from the other end of the first cylindrical portion, a plug member positioned between the other end of the first cylindrical portion and the other end of the second cylindrical portion, and an elastic body that covers at least the plug member and has an inner diameter equal to or smaller than the outer diameter of the plug member, and wherein gas flow to the container body is controlled by close contact between the plug member and the elastic body.