Repairable Substrate Via Filling With Low-Melting Crack Filler

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Solution Overview

Problem

Conventional substrate via filling processes result in cracks due to uneven substrate residue removal and varying thermal properties, leading to increased resistance and unreliability in electrical signal transmission.

Innovation Solution

Implementing a substrate with a first conductive material having a lower melting point than the via material, which can be heated to fill cracks without damaging the substrate, and a second conductive material to maintain electrical coupling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional substrate via filling processes are used, then the via can be filled with conductive material, but cracks occur due to uneven substrate residue removal and varying thermal properties

Engineering Contradiction:
Improvevia filling uniformityVSAvoidelectrical signal transmission reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent divides the via filling process into multiple stages: first removing substrate residue, then filling with conductive material, and finally performing a second residue removal. This segmented approach ensures uniform filling without cracks by addressing different issues at appropriate stages, resolving the contradiction between filling uniformity and transmission reliability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary substrate residue removal before via filling to prevent uneven thermal properties that would cause cracks. By preparing the substrate surface in advance, the filling process achieves uniformity without compromising the reliability of electrical signal transmission

Inventive Principle:
Principle #10Preliminary action

2Ease of repair

If high temperature heating is applied to fill cracks, then crack filling is achieved, but the substrate and via material are damaged

Engineering Contradiction:
Improvecrack filling capabilityVSAvoidsubstrate integrity
Core Design Contradiction:
Ease of repairVSStrength

Solution Approach 1:

The patent introduces a repair conductive material with specific local properties (lower melting point than via material) positioned only where needed for crack filling. This localized material with tailored thermal characteristics enables crack repair at lower temperatures, preserving substrate and via material strength while maintaining repair capability

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the thermal parameter (melting point) of the conductive material used for crack repair, selecting a material with a lower melting point than the via material. This parameter change allows selective melting and filling of cracks without damaging the substrate or via structure, resolving the contradiction between repair ease and structural strength

Inventive Principle:
Principle #35Parameter changes

3Reliability

If uniform substrate residue removal is achieved, then crack formation is prevented, but the process complexity increases

Engineering Contradiction:
Improveelectrical signal transmission reliabilityVSAvoidsubstrate preparation process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the residue removal process into distinct stages: pre-filling residue removal and post-filling residue removal. This segmentation achieves uniform substrate preparation that prevents cracks and ensures reliable electrical signal transmission, while organizing the complexity into manageable, sequential steps rather than a single complex operation

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively repairs cracks by filling them with a lower-melting-point conductive material, ensuring reliable electrical signal transmission and substrate integrity.

Implementation Method 1

a first conductive material having a lower melting point than the via material is disposed at a crack in the substrate via

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 2

the first conductive material is heated to a temperature effective to melt the first conductive material and fill the crack

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS12588147B2Filling cracks on a substrate via
Publication Date: 2026.03.24 MICRON TECHNOLOGY INC
  • US12588147B2 patent drawing
  • US12588147B2 patent drawing
  • US12588147B2 patent drawing

AI summary

A semiconductor device assembly is provided. The assembly includes a substrate having a first layer with a first contact and a second layer with a second contact. A via that includes a first conductive material electrically couples the first contact and the second contact. A second conductive material having a lower melting point than the first conductive material is disposed at least partially between the via and the second contact. When a crack occurs between the via and the second contact, the second conductive material may be heated to fill the crack. Thus, the techniques, apparatuses, and systems disclosed herein may provide a repairable substrate.