Substrate Treatment Vibration Control for Frozen Film Thawing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing freeze cleaning methods for substrates risk damaging fine patterns on the substrate surface when vibrations are applied during the thawing process of frozen films, which can cause foreign matter to re-adhere.
Innovation Solution
A substrate treatment apparatus and method that includes a vibrating part to transmit vibrations to the liquid film during thawing, with a controller adjusting the vibration energy based on the position of the frozen film's upper surface to prevent pattern damage and re-adhesion of foreign matter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If vibration is transmitted to the liquid during thawing process, then foreign matter removal rate is improved, but fine patterns on substrate surface may be damaged
Solution Approach 1:
The patent applies dynamic control by adjusting the vibration frequency and amplitude based on the real-time state of the frozen film thickness. The vibration parameters are dynamically modified during the thawing process to match the changing conditions, allowing effective foreign matter removal while protecting the substrate pattern from damage.
Solution Approach 2:
The patent changes physical parameters (vibration frequency and amplitude) according to the frozen film thickness. By monitoring the film thickness and adjusting vibration parameters accordingly, the system optimizes the balance between removing foreign matter effectively and preventing pattern damage on the substrate surface.
2Productivity
If high energy vibration is applied during thawing, then foreign matter detachment is enhanced, but re-adhesion prevention may cause pattern damage
Solution Approach 1:
The patent applies partial action by using vibration only during the specific thawing phase when needed, rather than continuously. The vibration is applied at controlled levels - sufficient to prevent re-adhesion of foreign matter but not excessive to cause pattern damage. This selective and moderate application resolves the contradiction between detachment efficiency and pattern safety.
Solution Approach 2:
The patent uses periodic vibration during the thawing process rather than continuous vibration. The vibration is applied in cycles that correspond to the thawing progress, providing intermittent agitation to prevent re-adhesion while allowing periods without vibration to minimize stress on the substrate patterns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes foreign matter from substrates while minimizing damage to fine patterns by controlling vibration energy, enhancing foreign matter removal rates.
Implementation Method 1
transmitting a vibration to the liquid at the front side of the substrate in the thawing process of the frozen film
Implementation Method 2
The water film is frozen by the supplied cooling gas. When the water film freezes to form a frozen film, foreign matter such as particles and the like are detached from the surface of the substrate by being incorporated into the frozen film
Implementation Method 3
the foreign matter is discharged outside the substrate together with the purified water by a centrifugal force
Data Source
AI summary
According to one embodiment a substrate treatment apparatus removes foreign matter from a surface of a substrate by forming a frozen film at the surface of the substrate, incorporating, into the frozen film, the foreign matter adhered to the surface of the substrate, and thawing the frozen film including the foreign matter. A liquid supply part that supplies a liquid to the frozen film including the foreign matter, a vibrating part that faces the frozen film, and a controller that controls the vibrating part are included. The controller controls the vibrating part to transmit a vibration to a liquid film, which includes the liquid supplied to the frozen film and a liquid generated by the thawing of the frozen film, and to reduce an energy of the vibration transmitted to the liquid film or stop the vibration according to a position of an upper surface of the frozen film under the liquid film.