Substrate Liquid Weight Measurement via Intermediary Chamber

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Solution Overview

Problem

The existing substrate treatment systems face challenges in accurately measuring and controlling the weight of organic solvents on substrates within a preset range, leading to contamination of peripheral devices, process defects, and exposure risks for operators due to the volatility of solvents and environmental changes during transfer.

Innovation Solution

An integrated apparatus and method that includes a liquid treating unit, a weight measuring unit within a buffer unit, and a transfer unit, where the weight of the substrate is measured before and after treatment, allowing for real-time adjustment of solvent flow to maintain the solvent weight within a preset range, and preventing operator exposure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the substrate is transferred outside the substrate treating system for weight measurement, then the operator can directly measure the weight, but the remained liquid may be exposed to the operator and volatilized during transfer

Engineering Contradiction:

Improvedirect measurement accessibilityVSAvoidoperator exposure to volatile solvent

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediary measurement chamber that serves as a bridge between the treatment chamber and external environment. The substrate is transferred to this intermediate chamber for weight measurement, preventing direct exposure of volatile solvents to the operator while maintaining measurement capability. This intermediary space acts as a buffer zone that isolates the harmful volatile substances from the operator.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If the substrate is transferred outside the substrate treating system for weight measurement, then the weight can be measured, but the weight may deviate from preset range due to environmental changes during transfer

Engineering Contradiction:

Improveweight measurement capabilityVSAvoidweight measurement accuracy

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The measurement chamber is designed with environmental control features that compensate for potential environmental changes before they affect the measurement. The chamber maintains stable temperature and pressure conditions, cushioning the measurement process from external environmental fluctuations that would otherwise cause weight deviations during transfer.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Productivity

If the substrate is transferred between chambers, then the liquid treating process can be completed, but time is spent in direct carrying by operator

Engineering Contradiction:

Improveprocess throughputVSAvoidoperator carrying time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The system implements automated transfer mechanisms where the substrate is automatically moved between the treatment chamber and measurement chamber without requiring manual carrying by the operator. The robotic transfer system performs the transport autonomously, eliminating the time-consuming manual handling step while maintaining the necessary process sequence.

Inventive Principle:

Principle #25Self-service

4Productivity

If the organic solvent amount is not controlled within preset range, then the process can proceed, but contamination of peripheral devices or process defects occur

Engineering Contradiction:

Improveprocess continuityVSAvoidsolvent amount control precision

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The system implements a feedback control mechanism where the weight measurement results from the measurement chamber are fed back to the liquid treating unit. Based on the measured weight of remained liquid, the system automatically adjusts the liquid supply amount in subsequent treatments, ensuring the organic solvent amount stays within the preset range and preventing contamination or process defects.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures precise control of solvent weight on substrates, reducing contamination risks, preventing process defects, and minimizing operator exposure to volatile solvents, while allowing for efficient and safe operation within the substrate treatment system.

Implementation Method 1

a weight measuring unit that measures a weight of the remained liquid on the substrate

Methodology Applied

Scientific EffectWeight measurement:

Implementation Method 2

a transfer unit that transfers the substrate between the liquid treating unit and the weight measuring unit

Methodology Applied

Scientific EffectMechanical transfer:

Data Source

PatentUS10529595B2Apparatus and method for treating substrate and measuring the weight of the remaining liquid on the substrate

Publication Date: 2020.01.07 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

Disclosed are an apparatus and a method for liquid-treating a substrate. An apparatus for treating a substrate includes a liquid treating unit that liquid-treats a substrate by supplying a liquid onto a substrate, a weight measuring unit that measures a weight of the remained liquid on the substrate, and a transfer unit that transfers the substrate between the liquid treating unit and the weight measuring unit. Accordingly, the weight of the remained liquid may be measured more promptly.