Suction Apparatus Recesses for Curved Substrate Release
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Solution Overview
Problem
Conventional suction apparatuses for end effectors struggle with precise positioning and rapid release of substrates, especially curved and sensitive ones, due to adhesion issues and potential damage from localized suction forces.
Innovation Solution
A suction apparatus with a main body featuring a through-channel and a sealing lip that surrounds a contact surface with recesses, allowing for direct substrate contact and secure fixation without relying on the sealing lip for holding force, enabling easy release and precise positioning by adapting pressure within the sealing lip to ambient pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a suction cup with large volume is used to hold curved substrates, then the substrate can be held without direct contact, but the release action becomes slow and adhesion occurs making release more difficult
Solution Approach 1:
The suction apparatus is segmented into a sealing lip portion and a main body portion with recesses. The sealing lip provides initial sealing and holding for curved substrates, while the recesses in the main body provide additional suction points that enable rapid release by distributing the release force across multiple locations.
Solution Approach 2:
The main body with recesses acts as an intermediary structure between the sealing lip and the substrate. It provides alternative suction paths that bypass the adhesion issues of the sealing lip, enabling faster release without compromising the ability to hold curved substrates.
2Force
If a suction groove with small diameter is used to maximize suction force, then holding force is improved, but thin and fragile substrates can be damaged
Solution Approach 1:
The suction apparatus has different local qualities: the sealing lip provides gentle initial sealing, while the recesses in the main body provide distributed suction forces. This local differentiation allows the system to maximize holding force through the recesses while the sealing lip prevents damage to fragile substrates during initial contact.
3Reliability
If the substrate lies directly on the end effector through a groove, then the substrate is prevented from moving after pickup, but this is only possible for substrates with particularly planar and smooth surfaces
Solution Approach 1:
The contact surface is segmented into a sealing lip portion and a main body portion with recesses. The sealing lip accommodates curved substrates by providing flexible sealing, while the recesses in the main body provide stable positioning for planar substrates. This segmentation allows the system to achieve reliable positioning for both curved and planar substrates.
4Force
If conventional suction grooves or seals are used to fix substrates, then suction force is concentrated at a small location, but this causes damage to particularly thin and fragile substrates
Solution Approach 1:
The suction apparatus distributes suction force across multiple locations: the sealing lip provides gentle initial contact, while the recesses in the main body provide distributed suction forces. This local quality differentiation prevents concentration of force at a single point, thereby protecting thin and fragile substrates from damage while maintaining effective holding force.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures precise and secure substrate positioning, easy release, and reduced risk of damage, as the substrate is fixed directly on the contact surface, and the sealing lip's pressure can be adjusted to ambient pressure for easy release, while maintaining vacuum for a duration dependent on the substrate.
Implementation Method 1
By means of a channel in the end effector, negative pressure can be produced within the suction cup or the suction groove, said negative pressure being able to be used for picking up flat objects, such as substrates or wafers.
Implementation Method 2
the pressure within the volume of the sealing lip can then be adapted to the ambient pressure, while the substrate is being held. As a result, the substrate is released more easily and precisely because the entire volume enclosed by the sealing lip no longer has to be flooded in order to release the substrate.
Implementation Method 3
For example, the release action is assisted by flushing the line or switching to excess pressure.
Data Source
AI summary
A suction apparatus for an end effector has a main body, which has a through-channel and a contact surface, and a sealing lip. The contact surface has an edge and recesses, wherein the through-channel issues into the recesses and the recesses terminate in front of the edge. The main body has a base portion and a fastening portion, which adjoins the base portion. In the fastening portion connection channels are provided which are in fluid communication with the through-channel and extend from the edge of the fastening portion. An end effector and a method of producing an end effector are also shown.