Suction Chuck With Detachable Micro-Hole Holder
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Solution Overview
Problem
Existing methods for manufacturing electronic devices on large-sized substrates face challenges in efficiently separating and transferring film-like objects due to clogging of suction holes in suction chucks, leading to reduced productivity and increased cleaning time.
Innovation Solution
The use of a substrate holder with detachable suction micro-holes and a suction chuck with larger diameter holes, allowing for efficient cleaning and improved suction capabilities, along with a method involving the formation of separation layers and adhesive layers to facilitate the separation and transfer of objects between substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If suction holes in suction chucks are made small to improve suction precision, then suction capability is improved, but clogging occurs more frequently
Solution Approach 1:
The invention divides the suction function into two independent components: a suction chuck with large holes for primary suction and a substrate holder with micro-holes for precise suction distribution. This segmentation allows each component to be optimized for its specific function without compromise
Solution Approach 2:
The substrate holder acts as an intermediary between the suction chuck and the substrate. It receives suction force from the chuck through its bottom surface and distributes it precisely through micro-holes to the substrate, mediating between the two conflicting requirements
2Manufacturing precision
If suction holes are made small for precise suction, then suction force distribution is improved, but cleaning time increases
Solution Approach 1:
The invention extracts the cleaning problem from the suction system by making the substrate holder detachable. The holder can be easily removed from the suction chuck and cleaned separately, significantly reducing cleaning time while maintaining the micro-hole structure for precise suction
Solution Approach 2:
The substrate holder is designed as a dynamic, detachable component rather than a fixed structure. This allows it to be easily removed for cleaning and reattached when needed, adapting the system to maintenance requirements without compromising operational precision
3Ease of manufacture
If substrate size is increased to reduce manufacturing cost, then cost efficiency is improved, but separation and transfer of objects becomes more difficult
Solution Approach 1:
The invention segments the large substrate into multiple smaller substrates that can be independently handled. The suction holder with its micro-hole pattern can selectively suction and transfer individual substrates or groups of substrates from a large panel, making large-scale manufacturing manageable
Solution Approach 2:
The invention replaces manual or simple mechanical separation methods with a vacuum-based suction system. The controlled suction and release mechanism enables precise separation and transfer of substrates without complex mechanical manipulation, greatly easing operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances productivity by reducing cleaning time, preventing clogging, and enabling simultaneous cleaning of multiple substrate holders, while maintaining effective suction forces for precise object transfer and cutting, thus improving yield and device stability.
Implementation Method 1
a suction chuck (also referred to as a suction stage or a vacuum chuck)
Data Source
AI summary
A method and an apparatus for manufacturing an object which involve a separation technique are provided. A first substrate provided with an object is attached to a second substrate and is then suction-fixed by using a suction chuck (also referred to as a suction stage or a vacuum chuck) including portions with different suction capabilities or by using its functional equivalent, and the second substrate is separated from the first substrate. Accordingly, the object is separated from the first substrate and transferred to the second substrate. An apparatus for achieving this is also provided. A substrate fixture surface of the suction chuck or its functional equivalent includes a plurality of portions provided with suction micro-holes and a portion provided with no holes. Owing to the plurality of portions provided with suction micro-holes, a plurality of objects can be transferred from the first substrate to the second substrate.