Non-Contact Suction Holder Height Control for Variable Workpiece Thickness
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Solution Overview
Problem
Existing non-contact-type suction holders in processing apparatuses struggle to apply sufficient negative pressure to workpieces of varying thicknesses, leading to unsuccessful unloading of thicker workpieces.
Innovation Solution
A processing apparatus with a delivery unit that includes a non-contact-type suction holder with an adjustable height, measured by a thickness-measuring unit such as a back pressure sensor or optical sensor, to ensure the suction holder is positioned correctly relative to the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the non-contact-type suction holder is set to a fixed position for holding thin workpieces, then thin workpieces can be held under suction, but thick workpieces cannot be held under sufficient negative pressure
Solution Approach 1:
The suction holder is made height-adjustable through a moving unit that can change its vertical position. The control unit receives thickness information from the measuring unit and dynamically adjusts the suction holder's height to maintain an appropriate gap for different workpiece thicknesses, enabling reliable suction holding across varying workpiece dimensions
Solution Approach 2:
The system changes the positional parameter (height) of the suction holder based on the measured thickness of the workpiece. By adjusting the height parameter dynamically, the system maintains the optimal gap between the suction holder and workpiece surface, ensuring sufficient negative pressure application regardless of workpiece thickness variations
2Reliability
If the non-contact-type suction holder is positioned close to the workpiece, then sufficient negative pressure can be applied, but the risk of contact increases
Solution Approach 1:
The system uses a measuring unit to detect the actual thickness of the workpiece and provides this information to the control unit. The control unit then adjusts the suction holder's height accordingly, creating a closed-loop feedback system that maintains the optimal gap distance, ensuring sufficient negative pressure while preventing contact
Solution Approach 2:
The system replaces fixed mechanical positioning with a dynamic adjustment mechanism controlled by measurement feedback. Instead of relying on predetermined fixed positions, the system uses the measuring unit and moving unit to dynamically determine and maintain the appropriate gap, eliminating the need for manual adjustment and reducing contact risk
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows the non-contact-type suction holder to apply a sufficient negative pressure to workpieces of different thicknesses, ensuring stable suction and successful delivery of workpieces within the processing apparatus.
Implementation Method 1
a non-contact-type suction holder for ejecting air to develop a negative pressure to attract and hold the workpiece under suction out of contact therewith
Implementation Method 2
The measuring unit may include a back pressure sensor or an optical sensor for measuring the thickness of the workpiece out of contact therewith
Implementation Method 3
The measuring unit may include a back pressure sensor or an optical sensor for measuring the thickness of the workpiece out of contact therewith
Data Source
AI summary
A processing apparatus includes a delivery unit for delivering a workpiece between a cassette placed on a cassette rest and a chuck table and a measuring unit for measuring a thickness of the workpiece. The delivery unit includes a base having a non-contact-type suction holder for ejecting air to develop a negative pressure to attract and hold the workpiece under suction out of contact therewith, and a moving unit for moving the base. The height of the non-contact-type suction holder is adjusted according to the thickness of the workpiece measured by the measuring unit to place the non-contact-type suction holder in a position that is spaced from a face side of the workpiece by a distance in a predetermined range while the workpiece is being delivered by the delivery unit.