Suction Separator Check Valve for Wafer Processing Water Management

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Solution Overview

Problem

The processing of plate-like workpieces is limited by the reduction in suction force caused by processing water entering the chuck table, leading to a lower number of workpieces that can be processed per unit time due to the need to fully discharge trapped water from a separator before processing can continue.

Innovation Solution

A processing apparatus with a chuck table and suction means that includes a separator and a check valve to prevent air from entering the suction pipe, along with a second suction source and sensor system to efficiently discharge trapped liquid, allowing continuous processing without waiting for full drainage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If the water discharge port of the separator is closed to prevent air from entering and reducing suction force, then the suction force is maintained, but the trapped processing water cannot be discharged and accumulates in the separator

Engineering Contradiction:

Improvesuction forceVSAvoidtrapped processing water

Core Design Contradiction:

ForceVSLoss of substance

Solution Approach 1:

A check valve is introduced as an intermediary component in the water discharge path. The check valve allows processing water to flow from the separator to the discharge port when the second suction source creates negative pressure, but prevents air from flowing back into the separator when the second suction source is not operating. This resolves the contradiction by enabling selective passage of fluid based on pressure differential.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Loss of substance

If the water discharge port is opened to discharge trapped processing water from the separator, then the processing water is removed, but air flows through the discharge port into the separator thereby reducing the suction force

Engineering Contradiction:

Improvetrapped processing waterVSAvoidsuction force

Core Design Contradiction:

Loss of substanceVSForce

Solution Approach 1:

The check valve acts as a one-way gate that permits processing water to exit the separator during discharge operations while blocking air from entering the separator during normal suction operations. This intermediary device enables the system to achieve both goals: maintaining suction force during processing and discharging trapped water when needed.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system dynamically switches between two operational states: during normal processing, the second suction source is off and the check valve blocks air entry; during discharge operations, the second suction source is activated and the check valve opens to allow water discharge. This dynamic operation resolves the contradiction by adapting the system behavior to the current operational requirement.

Inventive Principle:

Principle #15Dynamics

3Force

If the separator fully discharges trapped processing water before processing continues, then the suction force is maintained, but the number of workpieces processed per unit time is reduced

Engineering Contradiction:

Improvesuction forceVSAvoidnumber of workpieces per unit time

Core Design Contradiction:

ForceVSProductivity

Solution Approach 1:

The system enables continuous processing operations by maintaining the suction force without requiring periodic interruptions for full water discharge. The check valve allows small amounts of processing water to pass through during normal operation, preventing accumulation that would reduce suction force, thereby eliminating the need to stop processing for water discharge and maintaining continuous productivity.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution maintains suction force and increases the processing rate of plate-like workpieces per unit time by actively managing the discharge of processing water, enhancing energy efficiency by operating the second suction source only when necessary.

Implementation Method 1

an ejector for attracting the plate-like workpiece under a negative pressure that is developed when air flows

Methodology Applied

Scientific EffectNegative pressure generation by air flow: Venturi Effect

Implementation Method 2

a separator arranged in the first pipe, for separating a gas and a liquid drawn in from the chuck table

Methodology Applied

Scientific EffectGas-liquid separation: Sedimentation

Implementation Method 3

a check valve arranged in the second pipe, for preventing a fluid from flowing from the second suction source to the separator

Methodology Applied

Scientific EffectOne-way flow control: Valve

Data Source

PatentUS9975274B2Processing apparatus

Publication Date: 2018.05.22 DISCO CORP

AI summary

A processing apparatus includes a chuck table for holding a plate-like workpiece under suction. A suction unit is connected to the chuck table, and a processing unit is configured to process the workpiece while supplying processing water to the workpiece. The suction unit includes a first suction source, a first pipe providing fluid communication between the first suction source and the chuck table, a separator arranged in the first pipe, for separating a gas and a liquid drawn in from the chuck table, and a water discharging unit configured to discharge the liquid separated by the separator. The water discharging unit includes a second suction source, a second pipe providing fluid communication between the second suction source and a water discharge port of the separator, and a check valve arranged in the second pipe, for preventing a fluid from flowing from the second suction source to the separator.