Suction Stage with Segmented Wall and Valve Control
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Solution Overview
Problem
Existing suction stages struggle to accurately laminate deformed substrates, such as warped ones, due to difficulties in achieving uniform contact and alignment during the lamination process.
Innovation Solution
A suction stage with a mounting section and evacuation section that alternately control suction in different regions, allowing for precise alignment and deformation correction of substrates by equalizing suction force across the substrate surface, using a ring-shaped first and second wall part configuration and control valves to manage air evacuation and introduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If uniform suction is applied across the entire substrate surface, then the substrate can be held firmly on the mounting section, but deformed substrates cannot be accurately aligned and laminated
Solution Approach 1:
The mounting section is divided into multiple regions (first region and second region) with separate suction control, allowing independent suction adjustment for each region to accommodate substrate deformation while maintaining overall holding stability
Solution Approach 2:
The suction force is made dynamically adjustable across different regions through alternating suction and deactivation cycles, enabling the system to adapt to substrate shape changes during the lamination process
2Manufacturing precision
If suction is continuously applied to correct substrate deformation, then lamination accuracy improves, but the substrate cannot be released for removal
Solution Approach 1:
The suction control is segmented into multiple independently controllable regions, allowing selective deactivation of suction in specific areas to enable substrate release while maintaining holding in other areas
Solution Approach 2:
The suction is applied periodically rather than continuously, with alternating cycles of suction activation and deactivation, enabling both deformation correction during suction phases and substrate release during deactivation phases
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate lamination of deformed substrates by rectifying their shape and ensuring uniform suction, improving positional accuracy and reducing strain during the lamination process.
Implementation Method 1
an evacuation section configured to evacuate air between the first substrate and the mounting section
Data Source
AI summary
A suction stage may include a mounting section configured to mount a first substrate, and an evacuation section configured to evacuate air between the first substrate and the mounting section. The mounting section includes a ring-shaped first wall part, and a ring-shaped second wall part inside the first wall part. The evacuation section includes a first control valve between the evacuation section and a first region between the first and second wall parts, a second control valve between the evacuation section and a second region inside the second wall part, and a control section configured to control the valves. The control section is configured to control the valves so that suction and non-suction of the first substrate are alternately performed in at least one of the regions. Thus, suction of the first substrate may be deactivated in one of the regions, while the suction is active in the other region.