Sulfuric Acid Peroxide Removal Without Chloride Corrosion
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Solution Overview
Problem
Conventional methods for removing hydrogen peroxide from waste sulfuric acid either generate chlorine ions that corrode equipment or are inefficient and costly, limiting the reusability and quality of the acid for semiconductor manufacturing.
Innovation Solution
A method involving the use of a copper-based catalyst to react with hydrogen peroxide in sulfuric acid, generating heat, followed by cooling and reacting with hydrogen sulfide to form copper sulfide and purified sulfuric acid, eliminating the need for chlorine ions and reducing processing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If hydrochloric acid is added to waste sulfuric acid to remove hydrogen peroxide, then hydrogen peroxide removal efficiency is improved, but chlorine ions are generated which corrode equipment and lower product quality
Solution Approach 1:
The patent changes the chemical parameters by using copper-based catalysts instead of hydrochloric acid, and controlling temperature parameters (cooling to predetermined ranges) to achieve hydrogen peroxide removal without generating harmful chlorine ions. This parameter substitution resolves the contradiction between removal efficiency and harmful byproduct generation.
Solution Approach 2:
The patent uses copper-based catalysts that can be easily replaced or regenerated, avoiding the long-term equipment damage caused by chlorine ion corrosion from hydrochloric acid methods. The catalyst serves as a consumable component that protects the expensive equipment from corrosion.
2Quantity of substance
If enzymes are added to waste sulfuric acid to remove hydrogen peroxide, then hydrogen peroxide removal is achieved, but the process takes relatively long time and processing cost increases
Solution Approach 1:
The patent replaces the biological enzyme-based removal process with a chemical catalysis process using copper-based catalysts. This substitution changes the mechanism from biological reaction to chemical reaction, significantly reducing processing time while maintaining removal effectiveness.
Solution Approach 2:
The patent changes the reaction conditions by using copper-based catalysts that operate more rapidly than enzymes, and controls temperature parameters to optimize reaction speed. This parameter optimization resolves the contradiction between removal capability and processing time.
3Quantity of substance
If hydrochloric acid is used to remove hydrogen peroxide, then hydrogen peroxide is removed from waste sulfuric acid, but the sulfuric acid cannot be reused due to chlorine ion contamination
Solution Approach 1:
The patent uses copper-based catalysts as disposable or regenerable components that enable sulfuric acid purification without contamination. The catalyst absorbs the harmful reaction effects, allowing the sulfuric acid to be reused multiple times without chlorine ion accumulation.
Solution Approach 2:
The patent changes the chemical reaction pathway by using copper-based catalysts instead of hydrochloric acid, fundamentally altering the reaction products from chlorine-containing compounds to copper-based products that can be easily separated. This parameter change enables sulfuric acid reusability while maintaining hydrogen peroxide removal effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively removes hydrogen peroxide, producing high-purity copper sulfide and sulfuric acid suitable for reuse, enhancing safety and reducing processing costs.
Implementation Method 1
adding a catalyst containing copper and a copper compound to the vessel to undergo a reaction with the sulfuric acid (H2SO4) to remove the hydrogen peroxide (H2O2) from the sulfuric acid (H2SO4), to generate heat, and to generate metal ions in the sulfuric acid (H2SO4)
Implementation Method 2
adding a catalyst containing copper and a copper compound to the vessel to undergo a reaction with the sulfuric acid (H2SO4) to remove the hydrogen peroxide (H2O2) from the sulfuric acid (H2SO4), to generate heat
Implementation Method 3
activating a cooling device to cool the vessel to a predetermined temperature range
Implementation Method 4
adding hydrogen sulfide (H2S) to the vessel to undergo a reaction with the metal ions to generate metallic sulfide and metal free sulfuric acid (H2SO4)
Data Source
AI summary
A method of removing hydrogen peroxide from sulfuric acid includes the following steps: First step of pouring the sulfuric acid having 0.1 wt % to 10 wt % of hydrogen peroxide into a vessel. Second step of adding a catalyst containing copper and a copper compound to the vessel to undergo a reaction with the sulfuric acid to remove the hydrogen peroxide from the sulfuric acid, to generate heat, and to generate metal ions in the sulfuric acid. Third step of activating a cooling device to cool the vessel to a predetermined temperature range. Fourth step of adding hydrogen sulfide to the vessel to undergo a reaction with the metal ions to generate metallic sulfide and metal free sulfuric acid. Fifth step of purifying the metallic sulfide and the metal free sulfuric acid to obtain purified metallic sulfide and purified sulfuric acid as products.