Integrated Super-Resolution Laser Direct-Writing Device
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Solution Overview
Problem
Existing super-resolution laser direct-writing technologies face limitations in achieving high resolution due to the Abbe diffraction limit, and they struggle with integrating optical fibers and systems, making it difficult to realize precise carving and writing, especially in key devices and systems.
Innovation Solution
An integrated super-resolution laser direct-writing device is developed, comprising a combination of continuous lasers, optical fibers, photonic crystal fibers, dichroic mirrors, an auto-focusing module, and a control system, which uses central inducing light and peripheral vortex inhibiting light to enhance resolution, along with a specific photopolymerizable material and photo-initiators/inhibitors to control polymerization, allowing for precise patterning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If free optical path is adopted to achieve super-resolution laser direct-writing, then carving and writing resolution is improved beyond diffraction limit, but capability of realizing optical fibers of key devices and integration of systems deteriorates
Solution Approach 1:
The patent introduces optical fibers as intermediaries to transmit laser beams from the light source to the sample. Specifically, it uses a combination of single-mode optical fibers and photonic crystal optical fibers, where the photonic crystal fiber serves as a mediator to preserve the vortex structure of the laser beam while enabling system integration and optical fiber implementation that was previously incompatible with super-resolution techniques.
Solution Approach 2:
The patent employs a nested structure where the vortex beam is generated within the optical fiber system. The single-mode fiber feeds into the photonic crystal fiber, creating a nested configuration where the laser beam is transformed and maintained through multiple fiber stages, enabling both super-resolution capability and system integration.
2Device complexity
If Abbe diffraction limit is accepted, then system simplicity is maintained, but carving and writing resolution is limited to about half a wavelength
Solution Approach 1:
The patent changes the parameters of the laser beam by introducing a vortex phase structure through photonic crystal optical fibers. This parameter change transforms the conventional Gaussian beam into a vortex beam with a dark center, enabling resolution beyond the Abbe diffraction limit while maintaining a relatively simple overall system architecture through the use of standard optical components.
3Ease of manufacture
If conventional laser direct-writing is used, then system integration is easier, but resolution cannot break the diffraction limit
Solution Approach 1:
The patent uses a composite optical fiber system combining single-mode optical fiber and photonic crystal optical fiber. This composite structure leverages the advantages of both fiber types: the single-mode fiber provides stable beam transmission, while the photonic crystal fiber enables vortex beam generation and system integration, achieving both high resolution and ease of manufacture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves enhanced carving and writing resolution beyond the diffraction limit, enabling the integration of optical fibers and systems, thereby expanding applications in laser direct-writing and maskless photolithography.
Implementation Method 1
a photopolymerizable material and photo-initiators/inhibitors to control polymerization
Data Source
AI summary
Provided are an integrated super-resolution laser direct-writing device and a direct-writing method. The integrated super-resolution laser direct-writing device includes a first continuous laser, a first optical fiber coupler, a mono-mode optical fiber, a second continuous laser, a second optical fiber coupler, a first annular photonic crystal fiber, a bifurcated optical fiber, a lens group, a first dichroic mirror, an LED light source, a lens, a second dichroic mirror, an auto-focusing module, a third dichroic mirror, a third optical fiber coupler, a square-law graded index fiber, a nanometer displacement table, a second lens, a CMOS camera and a control system. According to the present invention, an original large direct-writing device based on a free optical path can achieve optical fibers of key devices and integration of systems and can be better applied to the field of laser direct-writing.