Superconducting Quantum Circuit Layout With Fewer Josephson Junction Steps
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Solution Overview
Problem
The existing superconducting quantum circuit fabrication process is lengthy and inefficient due to the independent structural forms of superconducting quantum interference devices and other elements, requiring multiple evaporation coating and oxidation steps.
Innovation Solution
A superconducting quantum circuit structure with a bottom electrode integrally connected to a second superconducting element and a top electrode forming a Josephson junction, allowing for synchronous patterning and reduced evaporation coating processes, facilitating efficient fabrication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the superconducting quantum interference device and superconducting elements are prepared independently with multiple evaporation coating and oxidation steps, then the structural independence and functionality are ensured, but the fabrication process becomes lengthy and process efficiency deteriorates
Solution Approach 1:
The patent combines the bottom electrode and the second superconducting element into a single integrated structure that is prepared in one patterning process rather than separately. This merging eliminates the need for multiple evaporation coating steps while ensuring the structural independence and functionality of both components is maintained through their integrated design
2Reliability
If multiple evaporation coating and oxidation steps are used to prepare independent structures, then the structural integrity and electrical connection are ensured, but the fabrication period extends and time consumption increases
Solution Approach 1:
The patent performs preliminary integration of the bottom electrode and second superconducting element in a single patterning step before subsequent processing. This preliminary action ensures structural integrity is established early, allowing subsequent oxidation and electrode formation to proceed without requiring separate preparation steps for each component, thereby reducing overall fabrication time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This structure enables shorter fabrication periods and improved process efficiency by integrating the bottom electrode and second superconducting element in one patterning process and forming the Josephson junction with fewer evaporation coating steps.
Implementation Method 1
a top electrode that is electrically connected at one end to the first superconducting element and forms a partial overlapping area with the barrier layer to obtain a Josephson junction at the overlapping area
Data Source
AI summary
A superconducting quantum circuit and a fabrication method thereof, as well as a quantum computer, belong to the field of quantum computing technology. The superconducting quantum circuit comprises a first superconducting element (21) and a second superconducting element (22) formed on a substrate (1), and a superconducting quantum interference device. The superconducting quantum interference device comprises: a bottom electrode (241) integrally connected to the second superconducting element (22); a barrier layer (242) located on the bottom electrode (241); and a top electrode (31) that is electrically connected at one end to the first superconducting element (21) and forms a partial overlapping area with the barrier layer (242) to obtain a Josephson junction at the overlapping area.