Superconducting Coil Cryostat With Point-Contact Vacuum Insulation
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Solution Overview
Problem
Current linear and planar motor systems in lithographic apparatuses face challenges in maintaining magnetic field density due to thermal insulation requirements, which increase the distance between coils and reduce the effectiveness of superconducting magnets at cryogenic temperatures.
Innovation Solution
A cryostat assembly with a flat coil layer of superconducting coils, using a vacuum-insulated cryostat with circular bodies for minimal thermal conductivity and high load-bearing capacity, allowing the coils to maintain cryogenic conditions and enhance magnetic field density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If thermal insulation is added to maintain cryogenic temperatures, then the insulation effectiveness improves, but the distance between coils increases reducing magnetic field density
Solution Approach 1:
The patent employs thin vacuum insulation layers and thermal shielding films to maintain cryogenic temperatures while minimizing the increase in overall thickness. The vacuum insulation acts as a thermal barrier without requiring thick solid material, thus limiting the distance increase between coil layers.
Solution Approach 2:
The patent applies thermal insulation selectively at critical locations where heat transfer occurs, rather than uniformly throughout the entire structure. This localized insulation approach maintains temperature control while minimizing the overall dimensional increase that would affect coil spacing.
2Loss of energy
If insulation layer thickness is increased to reduce thermal conductivity, then thermal insulation performance improves, but the stack height increases
Solution Approach 1:
The patent utilizes vacuum insulation which exploits the phase state of matter (vacuum) to achieve extreme thermal insulation with minimal thickness. By removing gas molecules entirely from the insulation layer, thermal conduction and convection are eliminated, providing superior insulation performance without increasing stack height.
Solution Approach 2:
The patent employs composite thermal insulation structures combining multiple materials with different thermal properties in a layered configuration. This includes combining vacuum barriers with reflective shielding layers and low-conductivity solid materials to achieve high insulation performance within compact dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains the increased magnetic field density in superconducting coils, enabling more precise and efficient patterning in lithographic apparatuses by minimizing thermal conductivity while supporting large forces and maintaining cryogenic conditions.
Implementation Method 1
the insulation system is configured to have a vacuum layer
Implementation Method 2
one or more layers of circular bodies each defining an at least partly circular contour and a central axis extending through a center of the circular contour as well as perpendicular to the circular contour
Implementation Method 3
a coil layer of superconducting coils, wherein the coil layer is configured for use in or with a magnetic levitation and/or acceleration motor system
Implementation Method 4
magnetic levitation and/or acceleration motor system
Data Source
AI summary
The invention provides an assembly having a cryostat and a flat coil layer of superconducting coils for use with a magnetic levitation and/or acceleration motor system of a lithographic apparatus. The cryostat has two insulation coverings. The coil layer is arranged between the two coverings. The coverings each have an inner plate configured to be cryocooled and an outer plate parallel to the inner plate, and an insulation system with a vacuum layer between the inner and outer plate. The insulation system of said covering has a layers of circular bodies, the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.