Superconducting Vias for Multi-Planar Quantum Circuit Interconnects

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Solution Overview

Problem

Current quantum computing technologies face challenges in providing efficient electrical connections for quantum circuits, particularly as the number of qubits increases, due to limitations in wirebonding methods that restrict scalability and hinder multi-planar connections, and require lossless transmission of low-intensity signals.

Innovation Solution

A metallization stack with superconducting signal and ground vias, fabricated using deep-reactive-ion-etched openings with conformally coated superconducting material, providing DC to microwave-frequency lossless connectivity between different planes of a quantum IC package, enabling multi-planar quantum circuits and efficient signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If wirebonding is used to provide electrical connections, then the quantum processor can be assembled with current limited number of qubits, but it faces significant challenges when scaled to accommodate quantum processors with much larger number of qubits due to insufficient edge space and inability to support multi-planar connections

Engineering Contradiction:
Improvescalability of quantum processorVSAvoidinterconnection complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent transitions from two-dimensional wirebonding at the chip edge to three-dimensional vertical vias through the chip substrate. This dimensional change enables connections to multiply stacked quantum circuit planes, allowing scalability to large numbers of qubits without being constrained by peripheral edge space. The vertical via structure provides inter-planar connectivity that wirebonding cannot achieve.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If traditional wirebonding is used, then current quantum processors can be connected, but multi-planar quantum circuits cannot be electrically connected as circuit elements in different planes are excluded from connection

Engineering Contradiction:
Improvemulti-planar connection capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The invention introduces vertical via structures that extend through the substrate to connect circuit elements across multiple planes. This three-dimensional interconnection approach enables multi-planar quantum circuits to be electrically connected, allowing circuit elements in different planes to communicate. The via-based methodology provides a manufacturing pathway for stacked quantum circuit architectures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If conventional interconnects are used, then connections can be provided, but signals with very small intensity (single photon or less) cannot be transmitted losslessly

Engineering Contradiction:
Improvesignal transmission fidelityVSAvoidsignal loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the physical parameters of the interconnect material by using superconducting material for the via structures. This parameter change enables lossless transmission of microwave signals with very small intensity (single photon or less) by eliminating resistive losses that would otherwise degrade the quantum signals. The superconducting property maintains signal fidelity while allowing extremely low-power operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables reliable, scalable, and lossless electrical connectivity for quantum circuits, supporting the operation of qubits at cryogenic temperatures and facilitating the integration of multiple quantum circuit components across different levels, thereby enhancing the performance and scalability of quantum processors.

Implementation Method 1

providing DC to microwave-frequency lossless connectivity between different planes of a quantum IC package

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Data Source

PatentEP3427310B1Superconducting microwave-frequency vias for mult-planar quantum circuits
Publication Date: 2021.09.15 TECH UNIV DELFT
  • EP3427310B1 patent drawingFigure 1
  • EP3427310B1 patent drawingFigure 2
  • EP3427310B1 patent drawingFigure 3

AI summary

Embodiments of the present disclosure provide a metallization stack that includes a superconducting signal via extending between a patterned top superconducting surface and a patterned bottom superconducting surface of a substrate, and a plurality of superconducting ground vias extending between the patterned top and bottom surfaces of the substrate substantially parallel to the signal via. The superconducting ground vias may be arranged in a ring, with the signal via being at a center of the ring. The signal via and the plurality of ground vias are configured to provide DC to microwave-frequency connectivity to at least one quantum circuit component housed by the substrate by virtue of each via being implemented as an opening having inner sidewalls coated with a layer of a superconducting material having a thickness of at least 50 nanometers.