Superconductive Particle Detector Grid for Atomic Resolution

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Solution Overview

Problem

Current three-dimensional atom probe technologies face challenges in accurately detecting and identifying particles at the atomic level with high resolution and sensitivity, particularly in distinguishing between different particles based on flight time alone, as they often rely on kinetic energy alone which can lead to misidentification.

Innovation Solution

A particle detector comprising superconductive and conductive lines intersected by insulating films, with detection circuits to measure voltage and current changes, allowing for precise identification of particle impact points and kinetic energy determination through tunneling currents and pulse voltage analysis, enabling accurate three-dimensional atom distribution mapping.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If particle detection relies on kinetic energy measurement alone, then detection simplicity is maintained, but particle identification accuracy deteriorates due to misidentification of particles with same kinetic energy

Engineering Contradiction:
Improveparticle identification accuracyVSAvoiddetection system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent transitions from one-dimensional kinetic energy measurement to two-dimensional measurement by incorporating flight time detection. The particle identification is enhanced by adding the time dimension (flight time from evaporation to detection) to the existing energy dimension, creating a unique identifier combination that resolves ambiguities in particle identification.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the detection parameters from solely kinetic energy to a combination of kinetic energy and flight time. By measuring both parameters simultaneously through the superconductive detector system, particles can be distinguished more accurately even when they have similar kinetic energies but different flight times.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If atomic-level analysis resolution is improved, then detection sensitivity increases, but the ability to distinguish between particles with same flight time deteriorates without additional parameters

Engineering Contradiction:
Improveatomic-level analysis resolutionVSAvoidparticle differentiation information
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The superconductive detector provides feedback through voltage changes that indicate particle impact. The detection circuit monitors voltage variations in the superconductive lines, and this feedback mechanism enables precise determination of both impact position and kinetic energy, preserving particle differentiation information at atomic-level resolution.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces traditional particle detection mechanisms with superconductive detection. The superconductive material's quantum mechanical properties (Cooper pair breaking upon particle impact) substitute for conventional detection methods, enabling simultaneous measurement of position, energy, and flight time with atomic-level precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If superconductive lines are used for particle detection, then detection sensitivity and resolution are improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddetector fabrication ease
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The detector is segmented into multiple superconductive lines arranged in a grid pattern on the substrate. Each line can be independently fabricated and connected to separate detection circuits, allowing modular manufacturing and testing. This segmentation reduces the overall manufacturing complexity compared to a monolithic superconductive detector.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Normal conductive lines are introduced as intermediaries between the superconductive lines and the detection circuits. These normal conductive lines facilitate electrical connections and signal routing without requiring the entire system to be superconductive, simplifying the manufacturing process while maintaining detection sensitivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate detection of particle flight times and positions, distinguishing between particles with the same flight time based on kinetic energy, thereby improving the resolution and sensitivity of three-dimensional atom distribution analysis.

Implementation Method 1

a plurality of superconductive lines each including a superconductive material

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Implementation Method 2

The insulating films are each interposed at an intersection point between one of the plurality of superconductive lines and one of the plurality of conductive lines

Methodology Applied
Scientific EffectTunneling current:

Data Source

PatentUS11588092B2Particle detector, particle detection apparatus, and particle detection method
Publication Date: 2023.02.21 KIOXIA CORP
  • US11588092B2 patent drawing
  • US11588092B2 patent drawing
  • US11588092B2 patent drawing

AI summary

A particle detector according to one embodiment includes: superconductive lines, conductive lines, insulating films, a first detection circuit, and a second detection circuit. The superconductive lines extend in a first direction and are arranged in a second direction intersecting the first direction. The conductive lines extend in a third direction different from the first direction and are arranged in a fourth direction intersecting the third direction. The insulating films are each interposed at an intersection point between one of the superconductive lines and one of the conductive lines. The first detection circuit detects a voltage change occurring in the superconductive lines. The second detection circuit detects a current or a voltage generated in the conductive lines when the voltage change occurs.