Supercontinuum Laser Spectrometer with Beam Diffuser and Dichroic Prism

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Solution Overview

Problem

Current sample investigation systems using electromagnetic radiation, such as reflectometers, spectrophotometers, ellipsometers, and polarimeters, face limitations in achieving high intensity, directional coherent spectra over a broad wavelength range (400-2500 nm) and struggle with spatial and temporal fluctuations due to coherence effects, which affect data accuracy and consistency.

Innovation Solution

The system employs a supercontinuum laser source that generates a high-intensity, highly directional coherent spectrum through non-linear processes, combined with speckle reducers like beam diffusers and dichroic beam splitter-prisms to optimize wavelength dispersion and detection, allowing for multiple detectors to handle separate wavelength ranges effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a supercontinuum laser source is used to provide high intensity, highly directional coherent spectrum, then the intensity and directionality of the electromagnetic radiation beam is improved, but spatial and temporal fluctuations due to coherence effects worsen data accuracy and consistency

Engineering Contradiction:
Improveintensity of electromagnetic radiation beamVSAvoiddata accuracy and consistency
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

A beam diffuser is introduced as an intermediary component between the supercontinuum laser source and the sample. This diffuser scatters the coherent beam to reduce spatial coherence, thereby eliminating speckle patterns and coherence-induced fluctuations while preserving the high intensity and broad spectral coverage of the original source.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If a single detector system is used to cover a broad wavelength range (400-2500 nm), then the versatility of the system is improved, but the detection precision and optimization for specific wavelength ranges deteriorates

Engineering Contradiction:
Improvewavelength range coverageVSAvoiddetection precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The broad wavelength range (400-2500 nm) is segmented into multiple sub-ranges, with each range detected by a specialized detector optimized for its specific band. This segmentation allows each detector to operate at peak efficiency for its designated wavelength range while collectively covering the entire 400-2500 nm spectrum through the coordinated system.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different detectors are assigned to different wavelength ranges according to their optimal detection characteristics. Each detector is positioned and configured to detect specific wavelength bands where it performs best, creating a system where local detection quality is maximized for each wavelength region while maintaining overall spectral coverage.

Inventive Principle:
Principle #3Local quality

3Measurement precision

If multiple detectors with separate wavelength range optimizations are used, then the measurement precision for specific wavelength ranges is improved, but the device complexity increases

Engineering Contradiction:
Improvedetection precisionVSAvoiddetector system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system employs a universal beam diffuser component that works across all wavelength ranges (400-2500 nm) to reduce coherence effects, combined with a modular detector arrangement where multiple detectors function together as an integrated system. This multi-functional approach achieves high precision across the full spectrum while managing complexity through shared optical path and coordinated operation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration provides a stable and consistent electromagnetic radiation beam, enabling more accurate sample investigation across a wide wavelength range without the need for reconfiguring sources and detectors, significantly improving data quality and consistency in reflectometry, spectrophotometry, ellipsometry, and polarimetry.

Implementation Method 1

Non-linear processes include self-phase modulation, four-wave mixing, soliton dynamics and cross-phase modulation

Methodology Applied
Scientific EffectSelf-phase modulation:

Implementation Method 2

Non-linear processes include self-phase modulation, four-wave mixing, soliton dynamics and cross-phase modulation

Methodology Applied
Scientific EffectFour-wave mixing:

Implementation Method 3

Non-linear processes include self-phase modulation, four-wave mixing, soliton dynamics and cross-phase modulation

Methodology Applied
Scientific EffectSoliton dynamics: Soliton

Implementation Method 4

Non-linear processes include self-phase modulation, four-wave mixing, soliton dynamics and cross-phase modulation

Methodology Applied
Scientific EffectCross-phase modulation:

Implementation Method 5

application of improved detector systems and beam diffusers to reduce spatial coherence

Methodology Applied
Scientific EffectScattering: Scattering

Implementation Method 6

combination dichroic beam splitter-prisms, (which can be optimized as regards wavelength dispersion characteristics)

Methodology Applied
Scientific EffectDichroic reflection: Dichroic Filter

Data Source

PatentUS10422739B1Reflectometer, spectrophotometer, ellipsometer and polarimeter systems with a super continuum laser source of a beam of electromagnetism, and improved detector system
Publication Date: 2019.09.24 J A WOOLLAM CO
  • US10422739B1 patent drawing
  • US10422739B1 patent drawing
  • US10422739B1 patent drawing

AI summary

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.