Supercritical Processing Chamber Cleaning via Segmented Metal Blocks

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Solution Overview

Problem

Conventional techniques for cleaning the inside of supercritical processing chambers with narrow openings and large depths are inefficient due to the difficulty in accessing and disassembling the high-pressure, heavy metal blocks that compose these chambers.

Innovation Solution

A method involving a flat dish-like container storing a cleaning liquid that is conveyed into the processing chamber, where the cleaning liquid spreads under high pressure to effectively clean the chamber walls, and a cleaning attachment that uses back-and-forth movements of a substrate supporting member to wipe the chamber surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the processing chamber is designed with high pressure resistance using metal blocks, then the chamber can withstand high pressure during supercritical processing, but the chamber becomes heavy and difficult to disassemble for cleaning

Engineering Contradiction:

Improvepressure resistanceVSAvoidcleaning accessibility

Core Design Contradiction:

StrengthVSEase of operation

Solution Approach 1:

The processing chamber is divided into multiple metal blocks that can be disconnected from each other. This segmentation allows the chamber to be assembled and disassembled for cleaning while each block maintains its structural integrity and pressure resistance capability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A connection portion with a latch mechanism serves as an intermediary element between metal blocks. The latch can be engaged or disengaged to connect or separate blocks, enabling easy assembly and disassembly for cleaning without compromising the structural strength during operation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Quantity of substance

If the processing space is made deep and narrow to reduce processing fluid usage, then the amount of processing fluid is reduced, but cleaning becomes difficult

Engineering Contradiction:

Improveprocessing fluid usageVSAvoidcleaning accessibility

Core Design Contradiction:

Quantity of substanceVSEase of operation

Solution Approach 1:

The processing chamber is segmented into multiple blocks, which allows the deep and narrow processing space to be accessed through the connection portions between blocks. This segmentation creates accessible entry points for cleaning while maintaining the overall deep and narrow geometry that reduces processing fluid usage.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connection portion acts as an intermediary that provides access to the deep processing space. The latch mechanism allows operators to open the connection portion and insert cleaning tools into the deep, narrow processing space for effective cleaning.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If manual cleaning by operator's hand is used, then the cleaning method is simple, but it is not effective for deep and narrow processing spaces

Engineering Contradiction:

Improvecleaning method simplicityVSAvoidcleaning effectiveness

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The processing chamber is divided into separable metal blocks with connection portions. This segmentation enables the insertion of long cleaning tools through the connection portions to reach deep into the processing space, achieving effective cleaning while keeping the overall cleaning system relatively simple.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connection portion serves as an intermediary pathway that allows cleaning tools to access the deep processing space. This intermediary structure enables effective cleaning of the deep and narrow processing space without requiring complex cleaning equipment or procedures.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for thorough and efficient cleaning of the processing chamber without the need for pipes or complex connections, using a cleaning liquid of arbitrary composition and effectively removing contaminants from the chamber walls.

Implementation Method 1

filling the processing space with the processing fluid in the supercritical state

Methodology Applied

Scientific EffectSupercritical fluid: Supercritical Fluid

Implementation Method 2

the cleaning liquid spreads under high pressure to effectively clean the chamber walls

Methodology Applied

Scientific EffectHigh pressure: Pressure Increase

Implementation Method 3

effectively removing contaminants from the chamber walls

Methodology Applied

Scientific EffectDissolution: Solvation

Data Source

PatentUS20240157410A1Processing chamber cleaning method, cleaning attachment and substrate processing system

Publication Date: 2024.05.16 SCREEN HOLDINGS CO LTD

AI summary

This invention relates a processing chamber cleaning method for a supercritical processing apparatus for accommodating a supporting member supporting a substrate into a processing space of a processing chamber and processing the substrate by a processing fluid in a supercritical state in the processing space. The processing chamber cleaning method includes supporting a flat dish-like container storing a cleaning liquid on the supporting member and accommodating the supporting member into the processing space, filling the processing space with the processing fluid in the supercritical state and discharging the processing fluid. It is capable of effectively cleaning the inside of even a supercritical processing chamber including a processing space having a narrow opening and a large depth.