Supercritical Substrate Chamber Temperature Sensing for Uniform Drying
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Solution Overview
Problem
The challenge in supercritical drying processes is the difficulty in accurately measuring and maintaining uniform temperature distribution within a high-pressure, sealed chamber, which affects the uniformity of substrate drying treatment.
Innovation Solution
A substrate treating apparatus with a temperature measurement unit positioned between a housing and a cover unit, featuring a detachable temperature sensor, allows for precise temperature measurement and improved temperature distribution within the treatment space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is installed inside the sealed high-pressure chamber to measure temperature, then temperature measurement accuracy is improved, but maintaining chamber cleanliness and high pressure becomes difficult
Solution Approach 1:
The patent introduces an intermediary approach by installing the temperature sensor outside the sealed chamber and using thermal conduction through the chamber wall to measure the internal temperature. This mediator (chamber wall) allows temperature measurement without direct sensor contact with the high-pressure environment, thus maintaining chamber integrity while achieving measurement accuracy.
2Stability of the object's composition
If the temperature inside the chamber is not properly measured, then the supercritical state cannot be maintained, but installing a temperature sensor inside the chamber is difficult due to high pressure and cleanliness requirements
Solution Approach 1:
The patent replaces the direct mechanical insertion of a temperature sensor into the high-pressure chamber with an indirect measurement system. By using thermal conduction through the chamber wall and positioning the sensor externally, it substitutes a complex high-pressure penetration mechanism with a simpler external measurement approach that maintains supercritical state stability.
3Manufacturing precision
If the temperature distribution in the treatment space is non-uniform, then drying treatment uniformity is improved, but accurate temperature measurement and control become more difficult
Solution Approach 1:
The patent applies local quality by positioning temperature sensors at multiple specific locations on the chamber exterior to capture local temperature variations. This allows measurement of temperature distribution patterns across different regions, enabling identification and correction of non-uniform heating while maintaining overall drying treatment uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate temperature measurement and enhanced uniformity of drying treatment, ensuring consistent substrate processing outcomes.
Implementation Method 1
the drying fluid is heated and pressurized. Accordingly, both the temperature and pressure of the drying fluid rise to a temperature equal to or higher than critical point
Implementation Method 2
a temperature measurement unit installed in the vessel to measure the temperature of the treatment space
Implementation Method 3
the drying fluid is heated and pressurized. Accordingly, both the temperature and pressure of the drying fluid rise to a temperature equal to or higher than critical point, and the drying fluid changes phase to a supercritical state
Data Source
AI summary
The present invention relates to an apparatus for treating a substrate, and more particularly, to an apparatus for dry-treating a substrate by using a supercritical fluid. The apparatus for treating a substrate includes: a vessel having a treatment space; a support unit for supporting a substrate in the treatment space; a fluid supply unit for supplying a treatment fluid to the treatment space; a fluid exhaust unit for exhausting the treatment fluid from the treatment space; a heating unit installed in the vessel to heat the treatment space; and a temperature measurement unit installed in the vessel to measure the temperature of the treatment space, in which the vessel includes: a housing providing the treatment space; and a cover unit for covering a part or an entirety of an inner wall of the housing exposed to the treatment space in the inner wall of the housing, and the temperature measurement unit includes a temperature sensor provided between the housing and the cover unit.