Supercritical Drying Chamber Venting to Prevent Particle Contamination
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The introduction of external air into a supercritical drying apparatus at elevated pressure and temperature conditions leads to temperature differences and particle crowding due to the temperature imbalance, causing pattern leaning and contamination issues.
Innovation Solution
A substrate treating apparatus with a chamber member, shutter, and exhaust parts to manage airflow and temperature differences by closing the opening during treatment and using multiple exhaust parts to discharge internal and external air effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If external air is introduced into the chamber during supercritical fluid treatment, then the chamber can be ventilated and pressure can be equalized, but temperature differences occur due to the temperature imbalance between inlet air and internal environment, causing particle crowding and contamination
Solution Approach 1:
The exhaust parts are activated before external air is introduced into the chamber. This preliminary exhaust action removes internal air and creates a pressure difference that controls the airflow direction, ensuring that external air enters through the opening while processed air exits through exhaust parts, preventing particle crowding and contamination
Solution Approach 2:
The air flow path is segmented into distinct inlet and outlet paths. External air enters through the opening while processed air is discharged through separate exhaust parts positioned at different locations. This segmentation prevents mixing of air streams and eliminates particle crowding by directing airflow through controlled pathways
2Stability of the object's composition
If the opening of the chamber is closed during treatment, then temperature stability is maintained and particle crowding is prevented, but the chamber cannot be ventilated or pressure equalized
Solution Approach 1:
Before closing the opening to maintain temperature stability, the exhaust parts perform preliminary ventilation to equalize pressure and remove internal air. This preliminary action ensures the chamber is properly ventilated before sealing, eliminating the need for continuous opening while maintaining both temperature stability and adequate ventilation
Solution Approach 2:
The exhaust parts act as intermediaries that provide ventilation functionality without requiring the opening to remain open. By processing and discharging air through the exhaust parts, the system achieves ventilation while the opening remains closed to maintain temperature stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Minimizes temperature differences and prevents particle contamination by optimizing airflow, ensuring stable substrate treatment conditions and reducing pattern leaning during supercritical drying.
Implementation Method 1
a vessel part having a substrate treatment region formed for treating the substrate using a supercritical fluid
Implementation Method 2
a spin chuck configured to support the substrate is rotated, and spin drying is performed to dry the developer or the rinsing liquid remaining on the substrate using a centrifugal force applied by the spin chuck
Data Source
AI summary
A substrate treating apparatus of the present disclosure comprises: a chamber member having an accommodation space configured to accommodate a vessel part where a substrate treatment region constituting a supercritical treatment space are formed, and an opening configured to move the substrate inside or outside; a shutter configured to open or close the chamber member; and a first exhaust part configured to discharge an internal air from the accommodation space to the outside, wherein the temperature of the substrate treatment region is increased.