Supercritical Fluid Drying Chamber with Shear-Resistant Locking
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Solution Overview
Problem
The existing drying chambers for substrates using supercritical fluid have low pressure resistance due to the use of bolts that are easily broken by vertical shear forces, compromising the integrity of the sealed chamber.
Innovation Solution
A drying apparatus with a lifting mechanism that moves the lower chamber vertically to align with the upper chamber, using locking mechanisms to secure the connection in the horizontal direction, enhancing the pressure resistance of the sealed chamber, and incorporating a uniform flow assembly for uniform fluid distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If bolts are used to clamp the upper chamber and lower chamber to form a sealed chamber, then the chamber can be assembled and sealed, but the bolts are easily broken by vertical shear force resulting in low pressure resistance
Solution Approach 1:
The connection structure is divided into multiple components: connecting assemblies with connectors that extend through both chambers, and separate locking mechanisms that lock these connectors. This segmentation allows the locking force to be applied horizontally rather than vertically, preventing bolt breakage while maintaining seal integrity.
Solution Approach 2:
The locking direction is changed from vertical (same dimension as shear force) to horizontal (perpendicular dimension). The locking mechanisms apply locking force in the horizontal direction, which is perpendicular to the vertical shear force direction, thereby eliminating the shear stress that causes bolt breakage.
2Reliability
If the lower chamber is fixed on the lower chamber without vertical movement capability, then the structure is simple, but the locking mechanism cannot properly engage with the connecting assembly to provide sufficient pressure resistance
Solution Approach 1:
The lower chamber is made dynamically movable in the vertical direction through the lifting mechanism, allowing it to move from an initial position to a second position. This dynamic movement enables proper engagement between the locking mechanisms and connecting assemblies, ensuring reliable locking while maintaining structural simplicity.
Solution Approach 2:
The lifting mechanism preliminarily positions the lower chamber in the vertical direction before the locking mechanisms engage. By first moving the lower chamber to the correct position, the subsequent locking engagement is ensured to be proper and reliable, preventing premature or misaligned locking.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus improves the pressure resistance and sealing integrity of the chamber, ensuring reliable operation during high-pressure drying processes while preventing damage to the locking mechanisms and maintaining uniform fluid distribution.
Implementation Method 1
a lifting mechanism, disposed below the lower chamber, used for driving the lower chamber to move in the vertical direction
Implementation Method 2
a locking mechanism, used for locking or loosening the connecting assembly; when the lifting mechanism lifts the lower chamber to move upward, so that the lower chamber and the upper chamber are completely contacted, the locking mechanism locks the connecting assembly in the horizontal direction
Implementation Method 3
The IPA on the surface of the substrate dissolves into the supercritical fluid to remove the IPA from the substrate
Implementation Method 4
a porous plate, fixed on the first side surface of the annular gas guiding plate, the porous plate comprising a porous structure, and the supercritical fluid being distributed on the upper surface of the substrate by the gas guiding groove and the porous plate sequentially
Data Source
Figure 1
Figure 2~3
Figure 4a~4b
AI summary
The present invention discloses a drying apparatus and method for drying a substrate using supercritical fluid. The drying apparatus comprises an upper chamber, a lower chamber, a substrate tray, a lifting mechanism, a connecting assembly and a locking mechanism. The lower chamber is disposed below the upper chamber. The substrate tray is disposed on the lower chamber and is used for carrying the substrate. The lifting mechanism is disposed below the lower chamber and is used for driving the lower chamber to move in the vertical direction, so that the lower chamber is completely contacted with the upper chamber. The connecting assembly is connected to the upper chamber and the lower chamber. The locking mechanism is used to lock or loosen the connecting assembly when the lower chamber is in full contact with the upper chamber. After the locking mechanism locks the connecting assembly and the lifting mechanism withdraws from the lower chamber, the locking mechanism and the connecting assembly automatically contact due to the action of gravity of the chamber, and the upper chamber and the lower chamber are closed to form a sealed chamber. The present invention has the advantage of enhancing the pressure resistance of the sealed chamber.