Supercritical Fluid Filtration Layout for Substrate Processing
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Solution Overview
Problem
Conventional substrate processing apparatuses using supercritical fluids face issues with filter arrangement in piping systems, leading to inadequate filtering performance and excessive load on filters due to phase transitions of the processing fluid, which is not adequately addressed in existing technologies.
Innovation Solution
The apparatus is designed with distinct zones for liquid and supercritical fluid flow passages, featuring a first filter for liquid and a second filter for supercritical fluid, ensuring appropriate filter selection based on the fluid state, thereby optimizing filtering performance and preventing excessive load on filters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single filter is used in the piping system for processing fluid that undergoes phase transitions, then the device complexity is reduced, but the filtering performance becomes inadequate and excessive load acts on the filter
Solution Approach 1:
The piping system is segmented into multiple sections based on the phase of the processing fluid. A first filter is installed in the liquid phase section, and a second filter is installed in the supercritical phase section. This segmentation allows each filter to be optimized for its specific phase, preventing excessive load and ensuring adequate filtering performance throughout the system.
Solution Approach 2:
Different filter specifications are applied to different locations in the piping system according to the local fluid phase. The first filter is designed with specifications suitable for liquid processing fluid, while the second filter is designed with specifications suitable for supercritical processing fluid. This local quality approach ensures that each filter operates within its optimal performance range.
2Device complexity
If filter specification does not conform to the type of flowing fluid, then the device complexity is reduced, but the desired filtering performance cannot be obtained and filter degradation occurs
Solution Approach 1:
The filter system is divided into two distinct filter units positioned at different locations in the piping system. The first filter handles liquid phase fluid with specifications optimized for liquid filtration, while the second filter handles supercritical phase fluid with specifications optimized for supercritical fluid filtration. This prevents filter degradation by ensuring each filter is matched to the appropriate fluid type.
Solution Approach 2:
The filter specifications (such as pore size, material, and structure) are changed according to the phase parameters of the processing fluid. The first filter uses parameters suitable for liquid viscosity and density, while the second filter uses parameters suitable for supercritical fluid properties. This parameter adaptation ensures optimal filtering performance for each phase condition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures effective filtration by using filters specialized for their respective fluid states, maintaining clean processing conditions and preventing filter degradation, thus enhancing substrate processing efficiency.
Implementation Method 1
a heater which heats the liquid processing fluid supplied from the fluid supplier to or above a critical temperature of the processing fluid and causing a transition into a supercritical state
Data Source
AI summary
A substrate processing apparatus according to the invention includes a processing chamber which has an internal space capable of storing the substrate, a supplier which supplies the processing fluid in the form of a liquid, a heater which heats the liquid processing fluid supplied from the fluid supplier to or above a critical temperature of the processing fluid and causing a transition into a supercritical state, a flow passage forming part which forms a flow passage of the processing fluid from the supplier to the processing chamber by way of the heater, a first filter which is disposed in the flow passage between the supplier and the heater and filters the liquid processing fluid and a second filter which is disposed in the flow passage between the heater and the processing chamber and filters the processing fluid in the supercritical state.