Supercritical Fluid Heating for Stable Substrate Treatment
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Solution Overview
Problem
Existing substrate treatment processes using supercritical fluids face inefficiencies and increased particle contamination due to unintended phase changes during fluid expansion, which degrade process efficiency and substrate quality.
Innovation Solution
A substrate treating apparatus and method that includes a fluid supply unit with a first heater upstream of an orifice to maintain the treating fluid at a set temperature, allowing adiabatic expansion to critical temperature or higher, minimizing phase changes and reducing particle contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the supercritical fluid is adiabatically expanded after passing through the orifice, then the fluid can be supplied into the chamber, but an unintended phase change may occur
Solution Approach 1:
The patent applies preliminary action by heating the supercritical fluid to a set temperature or higher before it passes through the orifice. This pre-heating ensures that even after adiabatic expansion, the fluid temperature remains at or above the critical temperature, preventing unintended phase changes and maintaining reliable supercritical state during the treatment process.
Solution Approach 2:
The patent utilizes parameter changes by controlling the temperature parameter of the supercritical fluid. By adjusting the heating temperature to a set value or higher before orifice passage, the system changes the thermal state of the fluid to ensure it maintains supercritical conditions after expansion, thereby controlling the phase state parameter reliably.
2Reliability
If the treating fluid is heated to a set temperature or more before passing through the orifice, then phase changes are minimized, but energy consumption increases
Solution Approach 1:
The patent applies continuity of useful action by maintaining the fluid temperature at or above the set temperature continuously from the heating section through the orifice into the chamber. This continuous temperature maintenance ensures stable supercritical conditions throughout the process, preventing phase changes that would require additional energy corrections, thereby optimizing overall energy efficiency.
3Manufacturing precision
If the substrate is treated by dispensing treating liquid onto the substrate and then removing the liquid, then cleaning is achieved, but particles may remain on the substrate
Solution Approach 1:
The patent applies phase transitions by using the supercritical fluid's unique properties. The supercritical fluid penetrates and dissolves contaminants on the substrate, then through controlled expansion and phase change, the fluid evaporates completely without leaving liquid residues or particles, achieving superior cleaning quality without contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves process efficiency and reduces particle contamination on substrates by maintaining fluid temperature during expansion, ensuring stable supercritical fluid treatment and drying processes.
Implementation Method 1
The first heater heats the treating fluid passing through the orifice to a set temperature or more
Implementation Method 2
The treating fluid may be adiabatically expanded downstream of the orifice, and the set temperature may be a temperature that allows the temperature of the treating fluid adiabatically expanded after passing through the orifice to be maintained at a critical temperature or more
Data Source
AI summary
A method for treating a substrate is provided. The method includes the following steps: performing a process of treating the substrate by dispensing a supercritical fluid onto the substrate. A treating fluid flows through a treating fluid supplying regulator regulating an amount of the treating fluid before dispensed onto the substrate. The treating fluid is heated to a set temperature or more by a first heater before passing through the treating fluid supplying regulator, and the treating fluid is heated by a second heater when the treating fluid is passed through the treating fluid supplying regulator. The temperature of the treating fluid is lowered in rear region of the treating fluid supplying regulator. The set temperature is a temperature that allows the lowered temperature to be maintained at a critical temperature or more.