Pressure-Reduced Fluid Sampling for Supercritical Concentration Measurement
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Solution Overview
Problem
Current substrate treatment processes using supercritical fluids, such as carbon dioxide, face challenges in real-time measurement of chemical liquid concentrations, particularly isopropyl alcohol (IPA), due to high-pressure environments, making it difficult to monitor and control the concentration during the treatment process.
Innovation Solution
A substrate treating apparatus equipped with a concentration meter, sampling line, control valve, fluid pressure regulator, decompression tank, and purge gas supply line, allowing for controlled sampling and measurement of fluid concentrations within the high-pressure environment, enabling real-time monitoring and adjustment of the treatment process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a concentration measurement system is installed in the high-pressure vessel to measure chemical liquid concentration in real-time, then measurement capability is improved, but device complexity and safety risks increase due to high-pressure environment
Solution Approach 1:
The concentration measurement function is extracted from the high-pressure vessel environment and placed in a separate, safe measurement location. A sampling line extracts fluid samples from the vessel, transports them through a pressure-reducing valve, and delivers them to the concentration meter located outside the high-pressure zone, enabling measurement without exposing the measurement device to high-pressure risks
Solution Approach 2:
A sampling line acts as an intermediary component between the high-pressure vessel and the concentration measurement system. This intermediary transports the chemical liquid samples from the high-pressure environment to the safe measurement zone, enabling communication between the two systems without direct connection of the measurement device to the high-pressure vessel
2Reliability
If indirect measurement methods are used to measure residual fumes after process completion, then safety is improved by avoiding high-pressure measurement, but real-time monitoring capability is lost
Solution Approach 1:
The concentration measurement system enables continuous real-time monitoring of chemical liquid concentrations during the entire process. By sampling fluid continuously or at predetermined intervals and measuring concentration immediately after pressure reduction, the system maintains uninterrupted monitoring capability throughout the process, enabling timely detection of concentration changes and process optimization
3Productivity
If sampling and pressure reduction are performed at predetermined time points during substrate treatment, then process control is improved, but measurement time and process interruption increase
Solution Approach 1:
The pressure reduction and measurement process is designed to occur rapidly at predetermined time points during substrate treatment. The sampling line quickly extracts samples, the pressure-reducing valve rapidly reduces pressure, and the concentration meter performs quick measurements, minimizing the time the system is interrupted and maintaining high process efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient substrate treatment by allowing real-time measurement and control of chemical liquid concentrations, improving process performance and ensuring precise termination of treatment based on set concentration values.
Implementation Method 1
a decompression tank installed between the sampling line and the measurement line
Implementation Method 2
a fluid pressure regulator installed downstream the control valve in the sampling line and configured to adjust the passing fluid to a set pressure
Implementation Method 3
a concentration meter for measuring a concentration of a first fluid contained in a fluid in the measurement line
Data Source
AI summary
Provided is a concentration measuring apparatus, which measures a concentration of a fluid under a high-pressure environment, such as an environment in which a supercritical fluid is provided. The concentration measuring apparatus includes: a concentration meter for measuring a concentration of a first fluid contained in a fluid in the measurement line; a sampling line for transferring a process fluid of a processing space in which a substrate is treated in a high-pressure environment to the measurement line; a control valve for opening and closing the sampling line; a fluid pressure regulator installed downstream the control valve in the sampling line and configured to adjust the passing fluid to a set pressure; and a decompression tank installed between the sampling line and the measurement line.