Supercritical Fluid Supplier Moisture Control
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Solution Overview
Problem
Conventional supercritical fluid suppliers fail to effectively remove moisture from liquefied CO2, leading to pattern collapses and bridge defects during the supercritical drying process in semiconductor manufacturing, as they lack real-time moisture control capabilities.
Innovation Solution
A supercritical fluid supplier is designed with a moisture filter and analyzer to remove organic impurities and moisture from the gaseous source fluid, ensuring accurate moisture control by using a purifier with sequential filters and detectors to maintain low moisture concentrations in the supercritical fluid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional purifier is used to remove impurities from liquefied CO2, then organic impurities can be removed, but moisture is not effectively removed leading to pattern collapses and bridge defects
Solution Approach 1:
The purifier is divided into two independent filtration systems: a organic impurity remover and a moisture remover. Each segment targets specific contaminants, with the organic impurity remover handling hydrocarbons and the moisture remover handling water vapor. This segmentation allows each component to be optimized for its specific function, ensuring both organic impurities and moisture are effectively removed to prevent pattern collapses and bridge defects
Solution Approach 2:
A moisture remover is introduced as an intermediary component between the organic impurity remover and the supercritical fluid generator. This intermediary specifically targets moisture removal, which was the missing function in conventional purifiers. The moisture remover acts as a specialized mediator that handles the specific problem of water contamination without interfering with the organic impurity removal process
2Manufacturing precision
If moisture control is not implemented in the supercritical fluid supplier, then the system remains simple, but moisture fraction cannot be detected leading to frequent defects
Solution Approach 1:
A moisture detector is installed in the purifier to provide real-time feedback on moisture fraction in the CO2 stream. This feedback mechanism allows the system to monitor moisture levels continuously and adjust the moisture remover operation accordingly. The feedback loop enables precise moisture control by comparing actual moisture content with target values and making real-time adjustments to maintain optimal drying conditions
Solution Approach 2:
The moisture detector replaces complex mechanical moisture control methods with a sensing-based approach. Instead of using elaborate mechanical systems to physically separate and measure moisture, an optical or electromagnetic detection method is employed to sense moisture fraction non-invasively. This substitution achieves precise moisture measurement with simpler, more reliable detection technology
3Measurement precision
If real-time moisture detection is added to the supercritical fluid supplier, then accurate moisture control can be achieved, but the device complexity increases
Solution Approach 1:
The analyzer is designed to perform multiple functions: it detects both organic impurity fractions and moisture fractions in the CO2 stream using a single integrated system. The detector can switch between different measurement modes or simultaneously monitor both parameters, eliminating the need for separate detection systems. This multi-functionality achieves comprehensive impurity analysis while minimizing the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces moisture and organic impurities in the supercritical fluid, preventing defects like leaning and bridge defects, thereby enhancing the reliability of the supercritical drying process.
Implementation Method 1
a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure
Implementation Method 2
a purifier that removes organic impurities and moisture from the gaseous source fluid, wherein the purifier includes a first filter that filters the organic impurities from the gaseous source fluid, wherein an impurity-filtered source fluid is formed, and a second filter that filters moisture from the impurity-filtered source fluid, wherein a dehydrated source fluid is formed
Implementation Method 3
an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid, wherein the analyzer includes an impurity detector that detects organic impurities in the impurity-filtered source fluid and a moisture detector that detects moisture in the dehydrated source fluid
Implementation Method 4
the high purity liquefied CO2 is transformed into a supercritical state in a supercritical generator
Data Source
AI summary
A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.