Supercritical Fluid Supply Sequencing for Defect-Safe Substrate Processing

Solution Overview

Problem

Existing substrate processing methods face challenges in minimizing pattern leaning phenomena and particle occurrence during the removal of developers using supercritical fluids.

Innovation Solution

A substrate processing apparatus and method that utilize a fluid supplier with multiple supply lines and controlled fluid rates to bring the fluid into a supercritical phase, employing a sequence of supply rates and phases to evenly distribute the fluid and maintain pressure within the process chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If fluid is supplied at a high rate to quickly bring the fluid into a supercritical phase, then processing time is reduced, but pattern leaning phenomenon and particle occurrence increase

Engineering Contradiction:

Improveprocessing timeVSAvoidpattern leaning phenomenon

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The fluid supply process is divided into multiple sections with different supply rates. The compressing step includes a first section with a first fluid supply rate and a second section with a second fluid supply rate, allowing controlled progression to supercritical phase while minimizing pattern leaning and particle formation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The fluid supply rate is dynamically adjusted during the compressing step based on the phase state. The system transitions from a lower supply rate in the first section to a higher supply rate in the second section, adapting the supply conditions to the changing pressure and temperature conditions within the process chamber

Inventive Principle:

Principle #15Dynamics

2Productivity

If fluid is supplied at a high rate to quickly bring the fluid into a supercritical phase, then processing time is reduced, but particle occurrence increases

Engineering Contradiction:

Improveprocessing timeVSAvoidparticle occurrence

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The fluid supply process is divided into multiple sections with different supply rates. The compressing step includes a first section with a first fluid supply rate and a second section with a second fluid supply rate, allowing controlled progression to supercritical phase while minimizing pattern leaning and particle formation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The fluid supply rate is dynamically adjusted during the compressing step based on the phase state. The system transitions from a lower supply rate in the first section to a higher supply rate in the second section, adapting the supply conditions to the changing pressure and temperature conditions within the process chamber

Inventive Principle:

Principle #15Dynamics

3Productivity

If fluid supply rate is increased to enhance processing efficiency, then productivity improves, but uniform fluid distribution becomes difficult to maintain

Engineering Contradiction:

Improveprocessing efficiencyVSAvoiduniform fluid distribution

Core Design Contradiction:

ProductivityVSStability of the object's composition

Solution Approach 1:

The fluid supply process is divided into multiple sections with different supply rates. The compressing step includes a first section with a first fluid supply rate and a second section with a second fluid supply rate, allowing controlled progression to supercritical phase while minimizing pattern leaning and particle formation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The fluid supply rate parameter is changed at different stages of the compressing step. The system uses different supply rates (first rate and second rate) corresponding to different phases of pressure buildup, ensuring uniform fluid distribution while maintaining processing efficiency

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively minimizes pattern leaning and particle formation by ensuring uniform fluid distribution and controlled pressure changes, enhancing processing efficiency and reducing defects.

Implementation Method 1

a compressing step of the processing of the substrate to bring the fluid into a supercritical phase inside the process chamber

Methodology Applied

Scientific EffectSupercritical phase transition: Supercritical Fluid

Data Source

PatentUS12468227B2Apparatus and method for processing substrate

Publication Date: 2025.11.11 SAMSUNG ELECTRONICS CO LTD

AI summary

An apparatus for processing a substrate includes a process chamber; a support which is placed inside the process chamber and supports the substrate; a fluid supplier which supplies fluid into the process chamber; and a controller configured to perform a compressing step to bring the fluid into a supercritical phase inside the process chamber, in which the compressing step includes a continuous first section and second section, the fluid supplier includes a first portion and a second portion, and the controller supplies the fluid into the process chamber at a first speed during the first section using the first portion, and supplies the fluid into the process chamber at a second speed higher than the first speed during the second section using the second portion.