Superjunction Charge-Balance Structure for Fast Switching

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Solution Overview

Problem

Super-junction semiconductor power devices with floating regions have low recombination-generation rates, leading to undesirable switching speeds, especially in wide band gap materials, and introducing point defects to increase switching speed also increases leakage current.

Innovation Solution

The design includes multi-layered drift regions with charge balance layers and connection regions that provide a direct path for carrier flow, independent of recombination-generation rates, reducing switching losses and increasing switching speed without significantly increasing leakage current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If point defects are introduced into the semiconductor material to increase recombination-generation rates, then switching speed is improved, but leakage current increases

Engineering Contradiction:
Improveswitching speedVSAvoidleakage current
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The patent introduces connection regions as intermediary structures that provide a direct carrier transport path between the top region and charge balance regions, mediating the carrier flow to achieve fast switching without relying on point defects that would increase leakage current

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the structural parameters by introducing connection regions with specific conductivity types and configurations, transforming the carrier transport mechanism from recombination-generation dependent to direct path dependent, thereby improving switching speed without increasing leakage

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If floating regions are used in super-junction devices, then conduction losses are reduced, but switching speed becomes dependent on low recombination-generation rates

Engineering Contradiction:
Improveconduction lossesVSAvoidswitching speed
Core Design Contradiction:
Loss of energyVSSpeed

Solution Approach 1:

The patent segments the drift region into multiple charge balance layers with embedded connection regions, creating a structured pathway that maintains the low conduction losses of floating regions while enabling fast switching through direct carrier transport

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Connection regions serve as intermediaries that decouple the switching speed from recombination-generation rates by providing an alternative direct transport path for carriers, allowing the floating regions to maintain low conduction losses while switching speed is improved

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables faster switching speeds and reduced switching losses in super-junction devices while maintaining low conduction losses and high blocking voltages, using existing fabrication techniques for wide band gap semiconductor materials.

Implementation Method 1

connection regions that provide a direct path for carrier flow, independent of recombination-generation rates

Methodology Applied
Scientific EffectCarrier transport: Conduction (electrical)

Data Source

PatentEP3433880B1Superjunction power semiconductor devices with fast switching capability
Publication Date: 2023.12.20 GENERAL ELECTRIC CO
  • EP3433880B1 patent drawingFigure 1~2
  • EP3433880B1 patent drawingFigure 3
  • EP3433880B1 patent drawingFigure 4

AI summary

A super junction (SJ) device includes one or more charge balance (CB) layers. Each CB layer includes an epitaxial (epi) layer having a first conductivity type and a plurality of charge balance (CB) regions having a second conductivity type. Additionally, the SJ device includes a connection region having the second conductivity type that extends from a region disposed in a top surface of a device layer of the SJ device to one or more of the CB regions. The connection region enables carriers to flow directly from the region to the one or more CB regions, which decreases switching losses of the SJ device.