Supersonic Gas-Jet Plasma Source for High-Brightness Broadband Light

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Solution Overview

Problem

Existing laser-sustained plasma (LSP) light sources face limitations in brightness due to plasma growth towards the pump laser, requiring complex high-pressure vessels and cryogenic cooling, and suffer from instability and noise in liquid jet systems.

Innovation Solution

A broadband LSP light source utilizing supersonic gas jets that collide to form a localized high-pressure region, combined with a primary and pulsed-assisting laser to sustain plasma efficiently, eliminating the need for high-pressure vessels and cryogenic cooling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If pump laser power is increased to increase brightness, then plasma grows larger, but absorption in the plasma periphery becomes significant and power reaching the plasma focus diminishes, making LSP dimmer

Engineering Contradiction:
ImprovebrightnessVSAvoidlaser power absorption in plasma periphery
Core Design Contradiction:
Illumination intensityVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating a localized high-pressure region through colliding supersonic gas jets at a specific location, rather than using uniform high pressure throughout the entire system. This localized approach concentrates the plasma generation in a small volume, reducing peripheral absorption while maintaining high brightness at the focal point.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the pressure parameter locally by generating supersonic gas jets that collide to form a localized high-pressure region. This parameter change allows the plasma to be sustained in a small volume with high density, improving brightness without the peripheral absorption problems of larger plasma volumes.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If stagnant high-pressure gas is used, then plasma can be sustained, but plasma grows toward the pump laser absorbing light, limiting radiance

Engineering Contradiction:
Improveplasma sustainmentVSAvoidradiance
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent introduces dynamics by using flowing supersonic gas jets instead of stagnant gas. The continuous flow of gas through the interaction region allows plasma to be sustained reliably while preventing the plasma from growing toward the pump laser, as the gas flow continuously replenishes and removes plasma material.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent extracts the plasma confinement problem by using the colliding supersonic jets to create a localized high-pressure region that naturally confines the plasma. The plasma is sustained where the jets collide, and the continuous gas flow prevents plasma expansion toward the pump laser without requiring physical confinement structures.

Inventive Principle:
Principle #2Taking out (Extraction)

3Speed

If liquid jets are used at high speeds, then fast jets can be generated, but liquid jets become unstable breaking into spray, causing noise

Engineering Contradiction:
Improvejet speedVSAvoidjet stability
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The patent changes the physical state parameter by using gaseous supersonic jets instead of liquid jets. This parameter change allows the system to achieve high jet speeds while maintaining stability, as gases can flow supersonically without the instability and spray problems that occur with liquid jets at similar speeds.

Inventive Principle:
Principle #35Parameter changes

4Stress or pressure

If high-pressure vessels with transparent windows are used, then high-pressure plasma can be contained, but construction complexity and safety requirements increase

Engineering Contradiction:
Improvehigh-pressure containmentVSAvoidvessel construction
Core Design Contradiction:
Stress or pressureVSDevice complexity

Solution Approach 1:

The patent extracts the plasma from a high-pressure vessel environment and sustains it in a localized high-pressure region created by colliding supersonic jets in an otherwise low-pressure or atmospheric environment. This eliminates the need for complex high-pressure vessels with transparent windows, significantly reducing construction complexity and safety requirements.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies local quality by creating a localized high-pressure region only where needed (at the jet collision point) rather than maintaining high pressure throughout the entire containment volume. This allows the majority of the system to operate at low pressure, eliminating the need for complex high-pressure vessel construction.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances spectral radiance and brightness by delivering all pump laser radiation to a high-pressure region, reducing construction complexity and optical damage, while operating in a continuous-wave regime for high-brightness applications.

Implementation Method 1

the plurality of jet nozzles are configured to generate a plurality of supersonic gas jets and direct the plurality of supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point

Methodology Applied
Scientific EffectSupersonic gas jet collision: Shock Wave

Implementation Method 2

LSP light sources typically operate by focusing laser radiation into a gas volume in order to excite the gas, such as argon or xenon, into a plasma state, which is capable of emitting light. This effect is typically referred to as 'pumping' the plasma.

Methodology Applied
Scientific EffectLaser pumping: Absorption (EM radiation)

Implementation Method 3

excite the gas, such as argon or xenon, into a plasma state, which is capable of emitting light

Methodology Applied
Scientific EffectPlasma emission: Luminescence

Data Source

PatentUS12538408B2Laser-sustained plasma generation in supersonic gas jets
Publication Date: 2026.01.27 KLA CORP
  • US12538408B2 patent drawing
  • US12538408B2 patent drawing
  • US12538408B2 patent drawing

AI summary

A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.