Superstrate Chuck Geometry for Uniform Light Curing
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Solution Overview
Problem
Current planarization techniques in semiconductor fabrication face challenges due to irregular substrate topography, which affects the depth of focus and critical dimension uniformity in lithographic processes, and the geometric structures in light transmitting chucks cause non-uniform light transmissivity, leading to uneven curing and material shrinkage during the planarization process.
Innovation Solution
A light transmitting chuck with a geometric structure featuring rounded edges and roughened surfaces is used to retain a superstrate or template, reducing light intensity variation and ensuring uniform light transmission for effective curing of formable materials on substrates, thereby improving planarization and substrate processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If geometric structures (sharp edges, smooth surfaces) are used in the light transmitting chuck, then manufacturing is easier, but light transmission uniformity deteriorates causing non-uniform curing
Solution Approach 1:
The chuck incorporates different surface treatments in specific locations: rounded edges at geometric structure boundaries and roughened surfaces in light transmission paths. This local differentiation ensures uniform light transmission and curing in critical areas while maintaining manufacturing feasibility through targeted modifications rather than complete redesign.
Solution Approach 2:
Sharp edges and corners of geometric structures are replaced with rounded edges having a specified radius of curvature. This curvature modification eliminates light scattering and shadowing effects at edges, ensuring uniform light transmission through the chuck while maintaining the functional geometric structures for fluid distribution.
2Manufacturing precision
If standard geometric structures are used in the chuck, then device complexity is reduced, but curing quality deteriorates due to non-uniform light transmission
Solution Approach 1:
The chuck maintains simple geometric structures for fluid distribution but applies local modifications (rounded edges, roughened surfaces) only where light transmission occurs. This selective approach improves curing uniformity without significantly increasing overall device complexity.
Solution Approach 2:
Instead of using complex optical systems or multiple light sources to achieve uniform curing, the patent substitutes a mechanically simple chuck with modified surface geometry that passively optimizes light transmission uniformity, reducing device complexity while improving curing quality.
3Manufacturing precision
If light curing is performed through a chuck with geometric structures, then the planarization process can be completed, but material shrinkage becomes non-uniform affecting planarization quality
Solution Approach 1:
The chuck applies localized surface treatments (rounded edges, roughened surfaces) in the light transmission regions to ensure uniform light distribution, which directly translates to uniform material shrinkage and improved planarization quality throughout the treated area.
Solution Approach 2:
The chuck's geometric structures with rounded edges and roughened surfaces are designed in advance to counteract potential non-uniform light transmission and material shrinkage before the curing process begins, ensuring consistent planarization results.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the uniformity of light transmission through the chuck, leading to improved curing rates and quality of the planarized layer, addressing the issues of substrate topography and non-uniform curing caused by geometric features in existing systems.
Implementation Method 1
The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced
Implementation Method 2
a curing process is performed on the formable material by radiating light through the chuck and the superstrate or the template. Preferably but optionally, the light for curing the formable material includes UV light
Data Source
AI summary
A chuck for retaining a superstrate or a template. The chuck comprises a geometric structure formed on a surface of the chuck. The geometric structure includes at least one of a rounded edge portion and a roughened surface portion, such that an intensity variation of light transmitting through the geometric structure and an area of the chuck adjacent to the geometric structure is reduced.