Support Device Temperature Control Mixer
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Solution Overview
Problem
Existing test systems face challenges in efficiently and flexibly controlling the temperature of substrates during electrical characteristic testing, particularly in maintaining stable temperature control and response speed.
Innovation Solution
A support device with a flow path for a temperature adjusting medium, a mixer for mixing external and internal mediums, a medium transfer mechanism, and a heater to control the temperature, allowing for precise temperature adjustment and stabilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a refrigerant supply system with multiple refrigerant pipes is used to control temperature in multiple test rooms, then temperature control capability is improved, but system complexity and response speed deteriorate
Solution Approach 1:
The support device divides the temperature control system into independent modules: a mixer unit that combines temperature adjusting medium with cooling medium, a medium transfer mechanism, and a heater. Each component performs a specific function, allowing the system to control temperature in multiple supports independently without requiring separate refrigerant pipes for each test room, thus reducing overall system complexity while maintaining temperature control capability.
Solution Approach 2:
The mixer is designed to handle multiple functions: it mixes the temperature adjusting medium with cooling medium, controls the mixing ratio, and directs the mixed medium to different supports. This multi-functional design eliminates the need for separate dedicated systems for each support, reducing device complexity while maintaining the ability to control temperature across multiple test rooms.
2Temperature
If a refrigerant supply system with multiple refrigerant pipes is used to control temperature in multiple test rooms, then temperature control capability is improved, but response speed deteriorates
Solution Approach 1:
The medium transfer mechanism pre-position s the cooling medium and temperature adjusting medium in the mixer before temperature control is needed. When temperature adjustment is required, the mixing operation can begin immediately without waiting for medium transport, significantly improving response speed while maintaining the ability to control multiple supports simultaneously.
Solution Approach 2:
The system uses hydraulic or pneumatic actuation for the medium transfer mechanism and mixer, enabling rapid response and quick adjustment of temperature control parameters. This allows the system to respond quickly to temperature changes in multiple supports without the delays associated with mechanical refrigerant pipe systems.
3Temperature
If temperature adjusting medium is circulated through supports, then substrate temperature control is improved, but temperature stability deteriorates
Solution Approach 1:
The heater is controlled based on temperature measurements from the supports, creating a feedback loop that maintains temperature stability. When the temperature adjusting medium causes temperature to drop below the target, the heater activates to compensate, ensuring stable temperature conditions for substrates while still enabling active temperature control through the circulating medium.
Solution Approach 2:
The system changes the parameters of the temperature adjusting medium (such as flow rate, temperature, or mixing ratio in the mixer) dynamically to maintain stable substrate temperature. By adjusting these parameters in response to actual temperature conditions, the system achieves both effective temperature control and temperature stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible and stable temperature control of substrates, improving response speed and maintaining consistent temperature conditions during testing.
Implementation Method 1
a heater configured to heat the first temperature adjusting medium or the third temperature adjusting medium
Implementation Method 2
a mixer configured to discharge a third temperature adjusting medium, the first temperature adjusting medium flowing out from the outlet and a second temperature adjusting medium externally supplied being mixed at a ratio that is predetermined in the third temperature adjusting medium
Implementation Method 3
a medium transfer configured to transfer the third temperature adjusting medium to the inlet as the first temperature adjusting medium
Implementation Method 4
a support that supports an object to be tested and that includes a flow path inside, the flow path having an inlet and an outlet, and the flow path being configured to flow a first temperature adjusting medium from the inlet to the outlet
Data Source
AI summary
A support device includes a support that supports an object to be tested and that includes a flow path inside, the flow path having an inlet and an outlet, and the flow path being configured to flow a first temperature adjusting medium from the inlet to the outlet, a mixer configured to discharge a third temperature adjusting medium, the first temperature adjusting medium flowing out from the outlet and a second temperature adjusting medium externally supplied being mixed at a ratio that is predetermined in the third temperature adjusting medium, a medium transfer configured to transfer the third temperature adjusting medium to the inlet as the first temperature adjusting medium, and a heater configured to heat the first temperature adjusting medium or the third temperature adjusting medium.