Support Frame Self-Lifting Mechanism for Confined Vacuum System Moves

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Solution Overview

Problem

Integrated vacuum systems are challenging to move due to their weight and bulk, requiring extensive space and specialized lifting equipment, which is impractical in confined environments like subfabs, where assembly and maintenance are hindered by the need for on-site assembly and limited access.

Innovation Solution

A conversion kit that includes a frame lifting mechanism with an extendible member and movable elements to lift the support frame from within, allowing it to be moved without increasing the footprint, using hydraulic jacks or screw threads, and providing a safety mechanism to prevent accidental collapse.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the integrated vacuum system is assembled on-site within the sub fab, then the system can be installed in the operational environment, but the assembly process takes several days and inhibits the operation of other nearby systems

Engineering Contradiction:
Improveon-site assembly capabilityVSAvoidassembly time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The integrated vacuum system is divided into modular components that can be pre-assembled separately in a factory setting and then transported to the sub fab as a complete unit. The support frame is designed with segmented sections that can be easily connected, allowing rapid on-site assembly without requiring extensive on-site fabrication work

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system is pre-assembled in a factory environment before transportation to the operational site. All components including vacuum pumps, control electronics, and abatement units are installed and tested in advance on the support frame, eliminating the need for time-consuming on-site assembly and allowing immediate operation upon installation

Inventive Principle:
Principle #10Preliminary action

2Stability of the object's composition

If the support frame is designed with a base flush with the floor for stable mounting, then the system remains stationary, but the frame cannot be moved without external lifting equipment that requires extensive space

Engineering Contradiction:
Improveframe stabilityVSAvoidmovability
Core Design Contradiction:
Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The support frame incorporates a movable base mechanism with extendible lifting members that can transition between a retracted state (providing stable floor-mounted operation) and an extended state (enabling the frame to lift itself for relocation). The base includes movable elements with support portions that can extend below the base to push against the ground and lift the frame when needed

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The support frame includes self-contained lifting mechanisms with extendible members that enable the frame to lift itself without requiring external lifting equipment. The movable elements with support portions extend below the base to push against the ground, allowing the frame to autonomously elevate for moving between locations

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If external lifting equipment is used to move the support frame, then the frame can be relocated, but the equipment requires extensive space above and around the frame which is unavailable in confined sub fab environments

Engineering Contradiction:
Improveframe relocatabilityVSAvoidspace requirement
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The lifting mechanism is nested within the support frame structure itself. The movable elements with support portions are integrated into the frame's base, allowing the lifting function to be contained within the frame's footprint without requiring external equipment that would need additional space around the frame

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the assembly and transport of integrated vacuum systems outside the operational environment, reducing installation time and personnel requirements, while maintaining access for maintenance and reducing the risk of injury by allowing the system to lift itself off the ground without external lifting equipment.

Implementation Method 1

using hydraulic jacks or screw threads

Methodology Applied
Scientific EffectHydraulic jack: Hydraulic Press

Implementation Method 2

using hydraulic jacks or screw threads

Methodology Applied
Scientific EffectScrew thread: Screw

Data Source

PatentUS11415263B2Conversion kit for a support frame, a support frame and an integrated vacuum system mounted in a support frame
Publication Date: 2022.08.16 EDWARDS VACUUM LLC
  • US11415263B2 patent drawing
  • US11415263B2 patent drawing
  • US11415263B2 patent drawing

AI summary

A kit may include at least one frame lifting mechanism configured to be mounted within the support frame. The lifting mechanism may include a movable element configured to be movably mounted to the frame and an extendible member configured to extend between the movable element and a static member mounted on the frame. The movable element includes at least one support portion extending from a lower surface of the movable element when the movable element is mounted to the frame. The extendible member is configured to be movable between a compressed state and an extended state. The movable element is configured to be mounted to the frame such that on extension of the extendible member the movable element is pushed downwards and the at least one support portion moves below a base of the frame and provides a lifting force to the frame.