Support Socket Groove Reference for SiC Susceptor Flatness

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Solution Overview

Problem

In semiconductor and LED manufacturing, susceptors made from SiC coated on graphite substrates often have irregular flatness due to substrate deformation at high temperatures, leading to deviations in SiC thickness during machining and potential exposure of graphite, which deteriorates wafer properties and yield.

Innovation Solution

A support socket with a groove and machining reference surface is used to fix the substrate in place during deposition, preventing movement and ensuring accurate thickness control, made from the same material as the deposition layer to maintain environmental consistency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If SiC is coated onto a graphite substrate by CVD to improve susceptor lifetime and prevent foreign substance contamination, then the susceptor life and purity are improved, but the substrate deforms at high temperature causing irregular flatness and SiC thickness deviation

Engineering Contradiction:

Improvesusceptor lifeVSAvoidflatness

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The susceptor is divided into a graphite substrate and a SiC coating layer, with the SiC layer serving as both protective coating and structural component. This segmentation allows the substrate to provide mechanical strength while the SiC layer maintains flatness and prevents contamination.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The SiC coating is applied in advance to the graphite substrate before the deposition process, creating a stable base layer that prevents substrate deformation during subsequent high-temperature processing. This preliminary coating action ensures flatness is maintained throughout the manufacturing process.

Inventive Principle:

Principle #10Preliminary action

2Ease of operation

If the graphite substrate is placed on jigs for support, then the substrate can be held during deposition, but the substrate may move during the deposition process causing positioning errors

Engineering Contradiction:

Improvesubstrate supportVSAvoidpositioning accuracy

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

A susceptor with a specific susceptor contact area is introduced as an intermediary between the graphite substrate and the deposition chamber. This contact area provides stable mechanical support and precise positioning, preventing substrate movement during deposition while maintaining ease of operation.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Strength

If SiC is grown to high thickness on the graphite substrate, then the protective layer is improved, but the internal arrangement of the substrate cannot be checked and cutting position deviations occur during machining

Engineering Contradiction:

Improveprotective layer thicknessVSAvoidinternal structure visibility

Core Design Contradiction:

StrengthVSMeasurement precision

Solution Approach 1:

The SiC coating is applied with varying local thicknesses - thicker in areas requiring protection and thinner or transparent in areas requiring inspection. This allows the internal substrate arrangement to be checked while maintaining adequate protective coverage in critical areas.

Inventive Principle:

Principle #3Local quality

4Ease of manufacture

If the graphite substrate is exposed to the outside during machining, then material removal is achieved, but the substrate exposure deteriorates wafer properties and yield

Engineering Contradiction:

ImprovemachinabilityVSAvoidwafer yield

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The final susceptor structure is a composite material combining graphite substrate and SiC coating layer. The SiC layer protects the graphite substrate during machining and prevents substrate exposure, while the composite structure maintains both machinability and wafer yield by preventing harmful substrate exposure.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The support socket prevents substrate movement and ensures accurate positioning, allowing for consistent deposition layer thickness and maintaining the integrity of the substrate, even if parts of the socket remain after deposition, thus enhancing manufacturing precision and yield.

Implementation Method 1

A support socket with a groove and machining reference surface is used to fix the substrate in place during deposition, preventing movement

Methodology Applied

Scientific EffectMechanical constraint:

Implementation Method 2

a deposition step of coating a coupled body of the substrate and the support sockets with a deposition material to form a deposited layer

Methodology Applied

Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS20240352585A1Support socket and method for manufacturing parts using support socket

Publication Date: 2024.10.24 KNJ CO LTD

AI summary

The present invention relates to a support socket and a method for manufacturing a part having a deposited layer using the support sockets. A support socket according to one embodiment of the present invention, which consists of a top surface, a bottom surface, and side surfaces connecting the top surface and the bottom surface to each other, comprises: a groove formed on the bottom surface toward the top surface; and a machining reference surface as a plane forming the bottom of the groove.