Support Unit Block Layout for Flexible FOUP and Pod Buffering
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Solution Overview
Problem
Existing semiconductor manufacturing facilities face inefficiencies in the conveyance of substrates and consumables due to the fixed locations of stockers, under track buffers, and side track buffers, which hinder flexible storage and transport of pods and FOUPs without requiring installation modifications.
Innovation Solution
A support unit and line storage system that allows for flexible storage of pods and FOUPs in under track and side track buffers, utilizing a base part with block parts and spring plungers to stabilize and guide substrates and consumables, along with a transport system incorporating a rail and transport carts for efficient movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If stockers, UTBs, and STBs are fixedly provided around the rail, then installation stability is improved, but conveyance efficiency deteriorates due to inability to flexibly store pods and FOUPs
Solution Approach 1:
The support unit is divided into multiple block parts (first block parts and second block parts) that can be independently positioned and configured. Each block part can support different types of storage units (pods or FOUPs) at different locations, allowing flexible arrangement while maintaining overall system stability through the base part's fixed connection to the rail.
2Device complexity
If fixed storage locations are used for pods and FOUPs, then system simplicity is improved, but adaptability deteriorates due to inability to change storage configurations
Solution Approach 1:
The support unit incorporates movable and adjustable block parts that can be repositioned along the base part to accommodate different storage configurations. The block parts can be adjusted to support either pods or FOUPs at various positions, enabling dynamic reconfiguration of storage locations without changing the overall system structure or requiring installation modifications.
3Ease of manufacture
If existing infrastructure is not modified, then installation cost is reduced, but storage flexibility deteriorates due to fixed buffer locations
Solution Approach 1:
The support unit acts as an intermediary component between the fixed rail infrastructure and the storage units (pods and FOUPs). It provides the flexibility needed for different storage configurations while connecting to the existing fixed rail system, thereby enabling storage flexibility without requiring modifications to the existing infrastructure.
Data Source
AI summary
A support unit is provided. The support unit supports transport items, which include a first storage having two or more first vertices formed on a bottom thereof and a second storage having second vertices formed on a bottom thereof, but at different locations from the first vertices, and store articles including substrates or consumables for manufacturing a semiconductor device, and includes: a base part forming a bottom surface; first block parts provided on the base part and including first separation prevention surfaces, on which the first vertices are positioned, and which face or adjoin circumferential surfaces or corners of the first storage; and second block parts provided on the first block parts and including second separation prevention surfaces, on which the second vertices are positioned, and which face or adjoin circumferential surfaces or corners of the second storage.