Support Structure Vibration Attenuation With Force Compensation
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Solution Overview
Problem
Existing solutions fail to effectively compensate for reaction forces caused by the acceleration of movable modules on a machine's support structure, leading to severe vibrations that impair precision and performance, especially when multiple modules move in different directions.
Innovation Solution
A force compensation system with actuators and a sensing system that applies vibration suppression forces based on measured parameters to counteract reaction forces and dampen vibrations, incorporating both feedforward and feedback control mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If higher throughput is required, then fast motion of movable modules with significant actuating forces is needed, but this causes severe vibrations in the machine casting due to reaction forces
Solution Approach 1:
The force compensation system applies counteracting forces before the reaction forces can cause severe vibrations. By detecting the actuating forces in real-time and applying equal and opposite forces through compensation actuators, the system preemptively neutralizes the harmful vibration effects while maintaining high throughput operation
Solution Approach 2:
The system uses sensors to detect vibration parameters and reaction forces in real-time, then feeds this information back to the force compensation system. This closed-loop feedback mechanism continuously adjusts the compensation forces to maintain optimal vibration attenuation while preserving high productivity
2Object-affected harmful factors
If balance mass and metrology or force frames are used to mitigate reaction forces, then some vibration mitigation is achieved, but real-time changes in acceleration and center of gravity cannot be effectively compensated
Solution Approach 1:
The force compensation system is dynamically adaptive, continuously adjusting compensation forces based on real-time detection of acceleration changes and center of gravity shifts. Unlike static balance masses, this system modifies its compensation strategy moment-by-moment to match the actual motion conditions, achieving both vibration mitigation and real-time adaptability
Solution Approach 2:
Real-time sensors detect changes in acceleration and center of gravity positions, feeding this data back to the control system. The system then dynamically recalculates and applies appropriate compensation forces, enabling continuous adaptation to changing operational conditions while maintaining vibration control
3Productivity
If multiple movable stages are driven to move along different directions, then productivity is improved, but vibration compensation becomes more complex and existing solutions fail to effectively compensate for reaction forces
Solution Approach 1:
The force compensation system serves multiple functions simultaneously: it compensates for reaction forces from multiple movable stages moving in different directions, adapts to changing acceleration patterns, tracks center of gravity shifts, and maintains vibration attenuation across varying operational conditions. This multi-functional approach handles complex multi-directional motion without proportionally increasing system complexity
Solution Approach 2:
The system uses real-time feedback from sensors monitoring multiple stages' positions, velocities, and accelerations to dynamically calculate composite reaction forces. The control system processes this multi-source data and coordinates compensation forces across multiple actuators, enabling effective vibration control for complex multi-directional operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces vibrations, improving machine precision and performance by balancing reaction forces and damping residual vibrations, even with resilient isolators and heavy modules, while reducing the need for additional actuators with multiple modules.
Implementation Method 1
The support structure is isolated from a base by a resilient vibration isolator
Implementation Method 2
a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module
Implementation Method 3
a sensing system attached to the support structure for measuring a vibration parameter of the support structure
Implementation Method 4
the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the detected vibration parameter
Data Source
AI summary
An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure. The support structure is isolated from a base by a resilient vibration isolator. The apparatus includes a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module when the movable module is driven to move on the support structure, and a sensing system attached to the support structure for measuring a vibration parameter of the support structure, wherein the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the measured vibration parameter for attenuating vibration of the support structure.