Surface Analyzer Region of Interest Quantitative Analysis
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Solution Overview
Problem
Conventional surface analyzers, such as scanning probe microscopes, face difficulties in making detailed, quantitative determinations and comparisons of physical quantities on a sample surface, as existing display methods do not allow for easy specification of regions of interest or accurate comparison of characteristic values.
Innovation Solution
A surface analyzer with a first display processor creating a three-dimensional image from two-dimensional data, a section image creator for defining regions of interest, and a second display processor for displaying graphs of physical quantity distributions along these regions, enabling users to easily specify and analyze areas of interest on the sample surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If color information showing two-dimensional distribution of another physical quantity is mapped onto a three-dimensional image, then the correspondence relationship between distributions can be easily recognized, but detailed quantitative determination about the relationship between physical quantities becomes difficult
Solution Approach 1:
The patent divides the display into multiple regions: a three-dimensional image display area for qualitative visualization and a separate graph display area for quantitative analysis. This segmentation allows users to switch between qualitative recognition and quantitative measurement without compromise.
Solution Approach 2:
The patent introduces a graph as an intermediary representation that quantitatively expresses the relationship between physical quantities. The graph serves as a mediator between the three-dimensional image and precise measurement, enabling both qualitative and quantitative analysis.
2Area of stationary object
If conventional display methods are used to show three-dimensional images with color mapping, then overall distribution relationships are visible, but accurate comparison of characteristic values at specific positions becomes difficult
Solution Approach 1:
The display is segmented into a three-dimensional image area for viewing overall distribution and a separate graph area for comparing characteristic values at specific positions. This allows both functions to be performed simultaneously without interference.
Solution Approach 2:
The patent adds a new dimension to the display by introducing a graph that plots characteristic values along a line. This transforms two-dimensional spatial information into a one-dimensional quantitative profile, enabling precise comparison while preserving overall context.
3Measurement precision
If characteristic values are extracted from collected two-dimensional data for quantitative determination, then detailed analysis is possible, but the task becomes complex and time-consuming
Solution Approach 1:
The system pre-calculates and stores characteristic values along with the two-dimensional data during the measurement process. This preliminary action eliminates the need for complex post-processing operations, allowing users to directly view quantitative information in the graph display area.
Solution Approach 2:
The system automatically performs the complex task of extracting and organizing characteristic values without requiring manual intervention. The graph display is generated automatically from the collected data, making the quantitative analysis process self-service and eliminating time-consuming manual operations.
Data Source
AI summary
A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.